METHODS AND APPARATUS FOR ABATING ELECTRONIC DEVICE MANUFACTURING PROCESS EFFLUENT
    2.
    发明申请
    METHODS AND APPARATUS FOR ABATING ELECTRONIC DEVICE MANUFACTURING PROCESS EFFLUENT 审中-公开
    电子设备制造工艺流程的方法和装置

    公开(公告)号:US20100008838A1

    公开(公告)日:2010-01-14

    申请号:US12500257

    申请日:2009-07-09

    IPC分类号: B01D53/68 B01D53/00 G05D7/00

    摘要: A thermal abatement system is provided, including: a thermal abatement reactor; an inlet in fluid communication with the reactor; a process chamber in fluid communication with the inlet; a first sheathing fluid source in fluid communication with the inlet; a first flow control device, adapted to regulate a flow of a first sheathing fluid from the first sheathing fluid source; and a controller, in signal communication with the first flow control device, adapted to regulate the sheathing fluid by operating the first flow control device; wherein the inlet is adapted to receive an effluent stream from the process chamber and the first sheathing fluid from the first sheathing fluid source, to sheathe the effluent stream with the first sheathing fluid to form a sheathed effluent stream, and to introduce the sheathed effluent stream into the reactor.

    摘要翻译: 提供了一种减热系统,包括:热消除反应器; 与反应器流体连通的入口; 与入口流体连通的处理室; 与入口流体连通的第一护套流体源; 第一流量控制装置,适于调节来自第一护套流体源的第一护套流体的流动; 以及与第一流量控制装置进行信号通信的控制器,适于通过操作第一流量控制装置来调节护套流体; 其中所述入口适于接收来自所述处理室的流出物流和来自所述第一护套流体源的所述第一护套流体,以将所述流出物流与所述第一护套流体包裹以形成护套流出物流,并且将所述护套流出物流 进入反应堆。

    ON-LINE SOFTWARE RENTAL
    3.
    发明申请
    ON-LINE SOFTWARE RENTAL 有权
    在线软件租赁

    公开(公告)号:US20090210317A1

    公开(公告)日:2009-08-20

    申请号:US12426910

    申请日:2009-04-20

    IPC分类号: G06Q30/00 G06Q50/00

    CPC分类号: G06Q30/06 G06Q30/0601

    摘要: Methods, systems, and apparatus, including computer program products, for a rental service through a computer network. A collection of virtual containers is assigned to a set of users including one or more users. Each virtual container in the collection is configured to identify one or more software products that are rented by users in the set. A user in the set is authorized to access a software product through the computer network based on whether the software product is identified as a rented software product in one or more virtual containers of the collection assigned to the set of users.

    摘要翻译: 用于通过计算机网络租赁服务的方法,系统和装置,包括计算机程序产品。 一组虚拟容器被分配给一组用户,包括一个或多个用户。 集合中的每个虚拟容器被配置为识别用户在集合中租用的一个或多个软件产品。 该集合中的用户被授权通过计算机网络访问软件产品,其基于软件产品是否被识别为分配给该组用户的集合的一个或多个虚拟容器中的租用的软件产品。

    Electrostatic chuck having textured contact surface
    5.
    发明申请
    Electrostatic chuck having textured contact surface 有权
    具有纹理接触表面的静电吸盘

    公开(公告)号:US20070047170A1

    公开(公告)日:2007-03-01

    申请号:US11214286

    申请日:2005-08-29

    IPC分类号: H01L21/683

    CPC分类号: H01L21/6833 Y10T279/23

    摘要: An electrostatic chuck has an electrode embedded in a dielectric which is mounted on a pedestal. The dielectric has a contact surface with an average surface roughness of less than about 0.5 μm, a surface peak waviness of less than about 0.12 μm, and a surface peak waviness material ratio of greater than about 20%. The surface texture can be formed by lapping the dielectric surface with a slurry of abrasive particles.

    摘要翻译: 静电吸盘具有嵌入在基座上的电介质中的电极。 电介质具有平均表面粗糙度小于约0.5μm的接触表面,小于约0.12μm的表面峰波纹度以及大于约20%的表面峰波纹度材料比。 可以通过用研磨颗粒的浆料研磨电介质表面来形成表面纹理。

    Electrostatic chuck having textured contact surface
    7.
    发明授权
    Electrostatic chuck having textured contact surface 有权
    具有纹理接触表面的静电吸盘

    公开(公告)号:US07672110B2

    公开(公告)日:2010-03-02

    申请号:US11214286

    申请日:2005-08-29

    CPC分类号: H01L21/6833 Y10T279/23

    摘要: An electrostatic chuck has an electrode embedded in a dielectric which is mounted on a pedestal. The dielectric has a contact surface with an average surface roughness of less than about 0.5 μm, a surface peak waviness of less than about 0.12 μm, and a surface peak waviness material ratio of greater than about 20%. The surface texture can be formed by lapping the dielectric surface with a slurry of abrasive particles.

    摘要翻译: 静电吸盘具有嵌入在基座上的电介质中的电极。 电介质具有平均表面粗糙度小于约0.5μm的接触表面,小于约0.12μm的表面波峰波纹,以及大于约20%的表面波峰厚度材料比。 可以通过用研磨颗粒的浆料研磨电介质表面来形成表面纹理。

    Coating electrically conductive wire with polyolefin
    9.
    发明授权
    Coating electrically conductive wire with polyolefin 失效
    用聚烯烃涂覆导电丝

    公开(公告)号:US4107354A

    公开(公告)日:1978-08-15

    申请号:US782361

    申请日:1977-03-29

    IPC分类号: H01B11/18 H01B13/06 B29D27/00

    摘要: Disclosed is a coaxial cable having greatly improved mechanical and electrical properties derived from a foamed dielectric having a dielectric constant in the range of 1.32 to 1.1, such cable being provided by a novel method of coating a center conductor of the cable with a dielectric with an extruded cellular polyolefin base composition which has been rendered cellular by the direct injection of a blowing agent in a liquid form into the polymer during an extrusion process. Also disclosed is an apparatus and a method of continuous wire electropolishing and pre-coating.

    摘要翻译: 公开了一种具有从介电常数在1.32至1.1范围内的发泡电介质获得的具有极大改进的机械和电学性能的同轴电缆,这种电缆由通过电介质涂覆电缆的中心导体的新方法提供, 通过在挤出过程中直接将液体形式的发泡剂注射到聚合物中而使其成为细胞的挤出的多孔聚烯烃基础组合物。 还公开了连续丝网电抛光和预涂层的装置和方法。