发明申请
US20080003150A1 METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER
审中-公开
使用CDO室进行PFC排放的方法和装置
- 专利标题： METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER
- 专利标题（中）： 使用CDO室进行PFC排放的方法和装置
-
申请号： US11673548申请日： 2007-02-09
-
公开(公告)号： US20080003150A1公开(公告)日： 2008-01-03
- 发明人: Sebastien Raoux , Kuo-Chen Lin , Robbert Vermeulen , Daniel Clark , Stephen Tsu , Mehran Moalem , Allen Fox , Monique McIntosh , Joshua Putz , Eric Rieske , Poh Lee
- 申请人： Sebastien Raoux , Kuo-Chen Lin , Robbert Vermeulen , Daniel Clark , Stephen Tsu , Mehran Moalem , Allen Fox , Monique McIntosh , Joshua Putz , Eric Rieske , Poh Lee
- 专利权人： APPLIED MATERIALS, INC.
- 当前专利权人： APPLIED MATERIALS, INC.
- 主分类号： B01D53/00
- IPC分类号： B01D53/00 ; G05B11/00
摘要：
In certain aspects, a system is provided for abating perfluorocarbons (PFCs) from a gaseous waste stream that includes (1) a wet scrubber adapted to scrub a gaseous waste stream and having an outlet adapted to discharge a scrubbed gaseous waste stream; and (2) a controlled decomposition oxidation (CDO) system. The CDO system includes a CDO thermal reaction chamber that includes (a) an inlet coupled to the outlet of the wet scrubber; (b) a catalyst bed adapted to abate PFCs within the CDO thermal reaction chamber; and (c) an outlet. Numerous other aspects are provided.
信息查询
IPC分类:
