Invention Application
- Patent Title: Charge-trap nonvolatile memory devices and methods of fabricating the same
- Patent Title (中): 电荷陷阱非易失性存储器件及其制造方法
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Application No.: US11700315Application Date: 2007-01-31
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Publication No.: US20080006872A1Publication Date: 2008-01-10
- Inventor: Chang-Seok Kang , Jung-Dal Choi , Ju-Hyung Kim , Jong-Sun Sel , Jae-Sung Sim , Sang-Hun Jeon
- Applicant: Chang-Seok Kang , Jung-Dal Choi , Ju-Hyung Kim , Jong-Sun Sel , Jae-Sung Sim , Sang-Hun Jeon
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Priority: KR10-2006-0064518 20060710
- Main IPC: H01L29/788
- IPC: H01L29/788

Abstract:
Nonvolatile memory devices including device isolation patterns on a semiconductor substrate are provided. The device isolation patterns define a cell active region and a peripheral active region of the semiconductor substrate. Cell gate electrodes are provided that cross over the cell active regions. Memory cell patterns are provided between the cell gate electrodes and the cell active regions and extend toward the device isolation patterns. A tunnel insulation film is provided between the memory cell pattern and the cell active region. Related methods of fabricating nonvolatile memory devices are also provided herein.
Public/Granted literature
- US07772639B2 Charge-trap nonvolatile memory devices Public/Granted day:2010-08-10
Information query
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