发明申请
- 专利标题: SEMICONDUCTOR DEVICE
- 专利标题(中): 半导体器件
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申请号: US11773990申请日: 2007-07-06
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公开(公告)号: US20080017904A1公开(公告)日: 2008-01-24
- 发明人: Satoru AKIYAMA , Ryuta Tsuchiya , Tomonori Sekiguchi , Riichiro Takemura , Masayuki Nakamura , Yasushi Yamazaki , Shigeru Shiratake
- 申请人: Satoru AKIYAMA , Ryuta Tsuchiya , Tomonori Sekiguchi , Riichiro Takemura , Masayuki Nakamura , Yasushi Yamazaki , Shigeru Shiratake
- 专利权人: Hitachi, Ltd.,Elpida Memory, Inc.
- 当前专利权人: Hitachi, Ltd.,Elpida Memory, Inc.
- 优先权: JPJP2006-197602 20060720
- 主分类号: H01L27/108
- IPC分类号: H01L27/108 ; H01L21/8242
摘要:
A DRAM capable of realizing reduced power consumption, high-speed operation, and high reliability is provided. A gate electrode configuring a memory cell transistor of the DRAM is composed of an n-type polysilicon film and a W (tungsten) film stacked thereon. A part of the polysilicon film is embedded in a trench formed in a silicon substrate in order to elongate the effective channel length of the memory cell transistor. The other part of the polysilicon film is located above the trench, and an upper surface thereof is located above a surface of the silicon substrate (p-type well). Therefore, distances between the W film and a source and drain (n-type semiconductor regions) are ensured.
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