Invention Application
- Patent Title: Appearance Inspection Apparatus
- Patent Title (中): 外观检查装置
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Application No.: US11830320Application Date: 2007-07-30
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Publication No.: US20080024765A1Publication Date: 2008-01-31
- Inventor: Kenji OKA , Shigeru Matsui
- Applicant: Kenji OKA , Shigeru Matsui
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Priority: JP2006-207780 20060731
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G06F19/00

Abstract:
It is an object of the present invention to provide an appearance inspection apparatus capable of analyzing a difference in detection characteristics of detection signals obtained by a plurality of detectors, and capable of flexibly meeting various inspection purposes without changing a circuit or software.An appearance inspection apparatus including a sample stage 101 for supporting a sample 100, an illumination light source 103 for irradiating the sample 100 on the sample stage 101 with illumination light 111, a plurality of detectors 120a to 120d which are disposed at different positions from each other with respect to an illumination light spot of the illumination light source 103, and which detect scattered light 112 generated from a surface of the sample 100, a signal synthesizing section 105 which synthesizes detection signals from the plurality of detectors 120a to 120d in accordance with a set condition, an input operating section 109 for setting a synthesizing condition of the detection signal by the signal synthesizing section 105, and an information display section 108 for displaying a synthesizing map 220a structured based on a synthesized signal which is synthesized by the signal synthesizing section 105 in accordance with a condition set by the input operating section 109.
Public/Granted literature
- US07557911B2 Appearance inspection apparatus Public/Granted day:2009-07-07
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