发明申请
US20080026305A1 Apparatus and method for alignment using multiple wavelengths of light
审中-公开
使用多个波长的光进行对准的装置和方法
- 专利标题： Apparatus and method for alignment using multiple wavelengths of light
- 专利标题（中）： 使用多个波长的光进行对准的装置和方法
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申请号： US11492838申请日： 2006-07-26
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公开(公告)号： US20080026305A1公开(公告)日： 2008-01-31
- 发明人: Wei Wu , William M. Tong , Jun Gao , Carl Picciotto
- 申请人： Wei Wu , William M. Tong , Jun Gao , Carl Picciotto
- 主分类号： G03F9/00
- IPC分类号： G03F9/00 ; G03B27/42 ; G03C5/00
摘要：
A method and system are disclosed for aligning a lithography template having a pattern with a substrate in preparation for transferring the pattern to a surface of the substrate. The system includes an optical imaging system adapted to image a first alignment structure formed on a top surface of the template using light of a first wavelength and a second alignment structure formed on a top surface of the substrate using light of a second wavelength.
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