发明申请
US20080030298A1 METAL RESISTOR, RESISTOR MATERIAL AND METHOD 失效
金属电阻器,电阻材料和方法

METAL RESISTOR, RESISTOR MATERIAL AND METHOD
摘要:
A metal resistor and resistor material and method of forming the metal resistor are disclosed. The metal resistor may include an infused metal selected from the group consisting of: copper (Cu) infused with at least one of silicon (Si), nitrogen (N2), carbon (C), tantalum (Ta), titanium (Ti) and tungsten (W), and aluminum infused with at least one of silicon (Si), nitrogen (N2), carbon (C), tantalum (Ta), titanium (Ti) and tungsten (W). The method is less complex than conventional processes, allows control of the resistance by the amount of infusion material infused, and is compatible with conventional BEOL processes.
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