发明申请
- 专利标题: METAL RESISTOR, RESISTOR MATERIAL AND METHOD
- 专利标题(中): 金属电阻器,电阻材料和方法
-
申请号: US11869218申请日: 2007-10-09
-
公开(公告)号: US20080030298A1公开(公告)日: 2008-02-07
- 发明人: Chih-Chao Yang , Kaushik Chanda , Shyng-Tsong Cheng
- 申请人: Chih-Chao Yang , Kaushik Chanda , Shyng-Tsong Cheng
- 主分类号: H01C1/012
- IPC分类号: H01C1/012
摘要:
A metal resistor and resistor material and method of forming the metal resistor are disclosed. The metal resistor may include an infused metal selected from the group consisting of: copper (Cu) infused with at least one of silicon (Si), nitrogen (N2), carbon (C), tantalum (Ta), titanium (Ti) and tungsten (W), and aluminum infused with at least one of silicon (Si), nitrogen (N2), carbon (C), tantalum (Ta), titanium (Ti) and tungsten (W). The method is less complex than conventional processes, allows control of the resistance by the amount of infusion material infused, and is compatible with conventional BEOL processes.
公开/授权文献
- US07479869B2 Metal resistor and resistor material 公开/授权日:2009-01-20
信息查询