发明申请
- 专利标题: Process to manufacture CPP GMR read head
- 专利标题(中): 制造CPP GMR读头的工艺
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申请号: US11975247申请日: 2007-10-18
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公开(公告)号: US20080040914A1公开(公告)日: 2008-02-21
- 发明人: Stuart Kao , Chunping Luo , Chaopeng Chen , Takahiko Machita , Daisuke Miyauchi , Jeiwei Chang
- 申请人: Stuart Kao , Chunping Luo , Chaopeng Chen , Takahiko Machita , Daisuke Miyauchi , Jeiwei Chang
- 专利权人: Headway Technologies, Inc. and TDK Corporation
- 当前专利权人: Headway Technologies, Inc. and TDK Corporation
- 主分类号: G11B5/127
- IPC分类号: G11B5/127
摘要:
Using a beam of xenon ions together with a suitable mask, a GMR stack is ion milled until a part of it, no more than about 0.1 microns thick, has been removed so that a pedestal, having sidewalls comprising a vertical section that includes all of the free layer, has been formed. This is followed by formation of the longitudinal bias and conductive lead layers in the usual way. Using xenon as the sputtering gas enables the point at which milling is terminated to be more precisely controlled.
公开/授权文献
- US07810227B2 Process to manufacture CPP GMR read head 公开/授权日:2010-10-12
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