发明申请
- 专利标题： Collector with fastening devices for fastening mirror shells
- 专利标题（中）： 带紧固装置的收集器用于固定镜壳
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申请号： US11974718申请日： 2007-10-16
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公开(公告)号： US20080042079A1公开(公告)日： 2008-02-21
- 发明人: Wolfgang Singer , Wilhelm Egle , Markus Weiss , Joachim Hainz , Joachim Wietzorrek , Johannes Wangler , Frank Melzer , Bernhard Gellrich , Bernhard Geuppert , Erich Schubert , Martin Antoni
- 申请人： Wolfgang Singer , Wilhelm Egle , Markus Weiss , Joachim Hainz , Joachim Wietzorrek , Johannes Wangler , Frank Melzer , Bernhard Gellrich , Bernhard Geuppert , Erich Schubert , Martin Antoni
- 申请人地址： DE Oberkochen
- 专利权人： Carl Zeiss SMT
- 当前专利权人： Carl Zeiss SMT
- 当前专利权人地址： DE Oberkochen
- 优先权： EPPCT/EP02/00608 20020123; DE10138313.4 20010810
- 主分类号： G01J3/10
- IPC分类号： G01J3/10
摘要：
There is provided a system that includes a first optical sub-system contained in a first space, and a second optical sub-system contained in a second space. The first and said second spaces are separated by a structure selected from the group consisting of a diaphragm and a valve.