发明申请
- 专利标题： METHOD AND APPARATUS FOR CONTROLLING THE TEMPERATURE OF ELECTRONIC COMPONENTS
- 专利标题（中）： 用于控制电子元件温度的方法和装置
-
申请号： US11839899申请日： 2007-08-16
-
公开(公告)号： US20080042679A1公开(公告)日： 2008-02-21
- 发明人: Carel van de Beek , Stefan Kreissig , Volker Hansel , Sebastian Giessmann , Frank-Michael Werner , Claus Dietrich , Jorg Kiesewetter
- 申请人： Carel van de Beek , Stefan Kreissig , Volker Hansel , Sebastian Giessmann , Frank-Michael Werner , Claus Dietrich , Jorg Kiesewetter
- 申请人地址： DE Sacka
- 专利权人： SUSS MicroTec Test Systems GmbH
- 当前专利权人： SUSS MicroTec Test Systems GmbH
- 当前专利权人地址： DE Sacka
- 优先权： DE102006038457.1 20060816
- 主分类号： G01R31/02
- IPC分类号： G01R31/02
摘要：
In a method and an apparatus for measuring temperature-controlled electronic components in a test station, a component to be measured is held and positioned using a chuck, has a temperature-controlled and directed fluid flow applied to it and is electrically contact-connected using probes and is measured. The setting of the temperature of the component to the temperature at which the measurement is intended to be carried out is effected solely using a directed fluid flow at a defined temperature.
公开/授权文献
信息查询
