发明申请
US20080048169A1 HEAT-SHIELDED LOW POWER PCM-BASED REPROGRAMMABLE EFUSE DEVICE
有权
基于热屏蔽的低功耗PCM可编程的EFUSE设备
- 专利标题: HEAT-SHIELDED LOW POWER PCM-BASED REPROGRAMMABLE EFUSE DEVICE
- 专利标题(中): 基于热屏蔽的低功耗PCM可编程的EFUSE设备
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申请号: US11467294申请日: 2006-08-25
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公开(公告)号: US20080048169A1公开(公告)日: 2008-02-28
- 发明人: James P. Doyle , Bruce G. Elmegreen , Lia Krusin-Elbaum , Chung Hon Lam , Xiao Hu Liu , Dennis M. Newns , Christy S. Tyberg
- 申请人: James P. Doyle , Bruce G. Elmegreen , Lia Krusin-Elbaum , Chung Hon Lam , Xiao Hu Liu , Dennis M. Newns , Christy S. Tyberg
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L47/00
- IPC分类号: H01L47/00 ; H01L21/76
摘要:
An electrically re-programmable fuse (eFUSE) device for use in integrated circuit devices includes an elongated heater element, an electrically insulating liner surrounding an outer surface of the elongated heater element, corresponding to a longitudinal axis thereof, leaving opposing ends of the elongated heater element in electrical contact with first and second heater electrodes. A phase change material (PCM) surrounds a portion of an outer surface of the electrically insulating liner, a thermally and electrically insulating layer surrounds an outer surface of the PCM, with first and second fuse electrodes in electrical contact with opposing ends of the PCM. The PCM is encapsulated within the electrically insulating liner, the thermally and electrically insulating layer, and the first and second fuse electrodes.
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