发明申请
- 专利标题: MANUFACTURING OF FLEXIBLE DISPLAY DEVICE PANEL
- 专利标题(中): 柔性显示设备面板的制造
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申请号: US11839358申请日: 2007-08-15
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公开(公告)号: US20080050852A1公开(公告)日: 2008-02-28
- 发明人: Tae-Hyung Hwang , Ivan Nikulin , Hyung-Il Jeon , Sang-II Kim , Nam-Seok Roh
- 申请人: Tae-Hyung Hwang , Ivan Nikulin , Hyung-Il Jeon , Sang-II Kim , Nam-Seok Roh
- 优先权: KR10-2006-0079911 20060823
- 主分类号: H01L21/441
- IPC分类号: H01L21/441 ; H01L33/00
摘要:
A manufacturing method of a display panel for an LCD includes forming a gate line on a flexible insulation substrate, depositing a gate insulating layer on the gate line, forming a semiconductor layer on the gate insulating layer and forming a data line and a drain electrode on the semiconductor layer and the gate insulating layer. The forming the semiconductor layer may be performed by PECVD at about 100° C. to about 180° C., the gate insulating layer may have a thickness of about 2000 Å to about 5500. The method may further include performing hydrogen plasma treatment on the gate insulating layer after the depositing the gate insulating layer and annealing the substrate having the plurality of thin films after the forming the data line and the drain electrode. The insulation substrate may include PES.
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