发明申请
- 专利标题: System for magnetic scanning and correction of an ion beam
- 专利标题(中): 用于磁扫描和离子束校正的系统
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申请号: US11523148申请日: 2006-09-19
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公开(公告)号: US20080067436A1公开(公告)日: 2008-03-20
- 发明人: Bo H. Vanderberg , Robert D. Rathmell , Edward C. Eisner
- 申请人: Bo H. Vanderberg , Robert D. Rathmell , Edward C. Eisner
- 专利权人: Axcelis Technologies, Inc.
- 当前专利权人: Axcelis Technologies, Inc.
- 主分类号: H01J37/08
- IPC分类号: H01J37/08
摘要:
A magnetic scanner employs constant magnetic fields to mitigate zero field effects. The scanner includes an upper pole piece and a lower pole piece that generate an oscillatory time varying magnetic field across a path of an ion beam and deflect the ion beam in a scan direction. A set of entrance magnets are positioned about an entrance of the scanner and generate a constant entrance magnetic field across the path of the ion beam. A set of exit magnets are positioned about an exit of the scanner and generate a constant exit magnetic field across the path of the ion beam.
公开/授权文献
- US07615763B2 System for magnetic scanning and correction of an ion beam 公开/授权日:2009-11-10