发明申请
US20080067493A1 Diamond Electron Emission Cathode,Electron Emission Source,Electron Microscope,And Electron Beam Exposure Device
失效
金刚石电子发射阴极,电子发射源,电子显微镜和电子束曝光装置
- 专利标题: Diamond Electron Emission Cathode,Electron Emission Source,Electron Microscope,And Electron Beam Exposure Device
- 专利标题(中): 金刚石电子发射阴极,电子发射源,电子显微镜和电子束曝光装置
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申请号: US11665472申请日: 2006-06-19
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公开(公告)号: US20080067493A1公开(公告)日: 2008-03-20
- 发明人: Yoshiyuki Yamamoto , Akihiko Ueda , Yoshiki Nishibayashi , Takahiro Imai
- 申请人: Yoshiyuki Yamamoto , Akihiko Ueda , Yoshiki Nishibayashi , Takahiro Imai
- 优先权: JP2005-178163 20050617; JP2005-257452 20050906; JP2005-257791 20050906
- 国际申请: PCT/JP06/12263 WO 20060619
- 主分类号: H01J1/30
- IPC分类号: H01J1/30 ; C30B29/04 ; H01L29/06
摘要:
An object of the present invention is to provide an electron emission cathode and an electron emission source using diamond and having a high brightness and a small energy width that are suitable for electron ray and electron beam devices and vacuum tubes, in particular, electron microscopes and electron beam exposure devices, and also electronic devices using such cathode and source. The diamond electron emission cathode according to the present invention has single crystal diamond in at least part thereof. The diamond electron emission cathode has a columnar shape having a sharpened acute section and a heating section. One electron emitting portion is provided in the sharpened acute section. The electron emitting portion and heating section comprise a diamond semiconductor. The diamond semiconductor is a p-type semiconductor having p-type impurities at 2×1015 cm−3 or higher. The semiconductor is present in the electron emitting portion. A metal layer is formed on the surface of the electron emission cathode. The metal layer is present in at least part of the heating section. The shortest distance from the electron emitting portion to an end portion of the metal layer is 500 μm or less. An electric current for heating is supplied to the heating section with a pair of current introducing terminals, and some of the introduced electrons can be emitted from the electron emitting portion.