发明申请
US20080070161A1 MONOMER, POLYMER AND COMPOSITION FOR PHOTORESIST 失效
单体,聚合物和组合物

MONOMER, POLYMER AND COMPOSITION FOR PHOTORESIST
摘要:
The photoresist monomer including an oxime group, a polymer thereof and a photoresist composition containing the same are disclosed. The photoresist monomer is represented by following Formula. In Formula, R* is independently a hydrogen or a methyl group, and R is a substituted or unsubstituted C1˜C25 alkyl group with or without an ether group, or a substituted or unsubstituted C4˜C25 hydrocarbon group including an aryl group, a heteroaryl group, a cycloalkyl group or a multicycloalkyl group with or without an ether group, a ketone group or a sulfur.
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