发明申请
- 专利标题: MONOMER, POLYMER AND COMPOSITION FOR PHOTORESIST
- 专利标题(中): 单体,聚合物和组合物
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申请号: US11852664申请日: 2007-09-10
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公开(公告)号: US20080070161A1公开(公告)日: 2008-03-20
- 发明人: Deog-Bae Kim , Jung-Youl Lee , Geun-Jong Yu , Sang-Jung Kim , Jae-Woo Lee , Jae-Hyun Kim
- 申请人: Deog-Bae Kim , Jung-Youl Lee , Geun-Jong Yu , Sang-Jung Kim , Jae-Woo Lee , Jae-Hyun Kim
- 优先权: KR10-2006-0087655 20060911
- 主分类号: G03C5/00
- IPC分类号: G03C5/00 ; C07C309/00 ; C08G2/00 ; C08G75/00 ; G03C1/00
摘要:
The photoresist monomer including an oxime group, a polymer thereof and a photoresist composition containing the same are disclosed. The photoresist monomer is represented by following Formula. In Formula, R* is independently a hydrogen or a methyl group, and R is a substituted or unsubstituted C1˜C25 alkyl group with or without an ether group, or a substituted or unsubstituted C4˜C25 hydrocarbon group including an aryl group, a heteroaryl group, a cycloalkyl group or a multicycloalkyl group with or without an ether group, a ketone group or a sulfur.
公开/授权文献
- US07604919B2 Monomer, polymer and composition for photoresist 公开/授权日:2009-10-20
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