发明申请
- 专利标题: Microscope and sample observation method
- 专利标题(中): 显微镜和样品观察法
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申请号: US11979592申请日: 2007-11-06
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公开(公告)号: US20080074739A1公开(公告)日: 2008-03-27
- 发明人: Hirotoshi Terada , Ikuo Arata , Masaharu Tokiwa , Hiroshi Tanabe , Shigeru Sakamoto , Yoshio Isobe
- 申请人: Hirotoshi Terada , Ikuo Arata , Masaharu Tokiwa , Hiroshi Tanabe , Shigeru Sakamoto , Yoshio Isobe
- 专利权人: HAMAMATSU PHOTONICS K.K.
- 当前专利权人: HAMAMATSU PHOTONICS K.K.
- 优先权: JPP2004-053343 20040227; JPP2005-012103 20050119
- 主分类号: G02B21/00
- IPC分类号: G02B21/00
摘要:
For a semiconductor device S as an inspected object, there are provided an image acquisition part 1, an optical system 2 including an objective lens 20, and a solid immersion lens (SIL) 3 movable between an insertion position including an optical axis from the semiconductor device S to the objective lens 20 and a standby position off the optical axis. Then observation is carried out in two control modes consisting of a first mode in which the SIL 3 is located at the standby position and in which focusing and aberration correction are carried out based on a refractive index n0 and a thickness t0 of a substrate of the semiconductor device S, and a second mode in which the SIL 3 is located at the insertion position and in which focusing and aberration correction are carried out based on the refractive index n0 and thickness t0 of the substrate, and a refractive index n1, a thickness d1, and a radius of curvature R1 of SIL 3. This provides a microscope and a sample observation method capable of readily performing observation of the sample necessary for an analysis of microstructure or the like of the semiconductor device.
公开/授权文献
- US07576910B2 Microscope and sample observation method 公开/授权日:2009-08-18
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