发明申请
- 专利标题: OFFSET CORRECTION METHODS AND ARRANGEMENT FOR POSITIONING AND INSPECTING SUBSTRATES
- 专利标题(中): 偏移校正方法和布置定位和检查基板
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申请号: US11612370申请日: 2006-12-18
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公开(公告)号: US20080080845A1公开(公告)日: 2008-04-03
- 发明人: Jack Chen , Andrew D. Bailey , Ben Mooring , Stephen J. Cain
- 申请人: Jack Chen , Andrew D. Bailey , Ben Mooring , Stephen J. Cain
- 主分类号: G03B15/02
- IPC分类号: G03B15/02
摘要:
A bevel inspection module for capturing images of a substrate is provided. The module includes a rotational motor, which is attached to a substrate chuck and is configured to rotate the substrate chuck thereby allowing the substrate to revolve. The module further includes a camera and an optic enclosure, which is attached to the camera and is configured to rotate, enabling light to be directed toward the substrate. The camera is mounted from a camera mount, which is configured to enable the camera to rotate on a 180 degree plane allowing the camera to capture images of at least one of a top view, a bottom view, and a side view of the substrate. The module yet also includes a backlight arrangement, which is configured to provide illumination to the substrate, thereby enabling the camera to capture the images, which shows contrast between the substrate and a background.
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