发明申请
- 专利标题: Method of producing thin film magnetic head
- 专利标题(中): 制造薄膜磁头的方法
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申请号: US11892773申请日: 2007-08-27
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公开(公告)号: US20080087630A1公开(公告)日: 2008-04-17
- 发明人: Yuji Ito , Hiraku Hirabayashi , Yoshiyuki Mizoguchi , Nobuya Oyama
- 申请人: Yuji Ito , Hiraku Hirabayashi , Yoshiyuki Mizoguchi , Nobuya Oyama
- 申请人地址: JP TOKYO
- 专利权人: TDK CORPORATION
- 当前专利权人: TDK CORPORATION
- 当前专利权人地址: JP TOKYO
- 优先权: JP2006-281715 20061016
- 主分类号: B44C1/22
- IPC分类号: B44C1/22
摘要:
A method of producing a thin film magnetic head includes the steps of: forming a second lower magnetic pole layer in a part on a first lower magnetic pole layer; forming, over the entire wafer surface, an insulating layer so as to be thicker than the thickness of the second lower magnetic pole layer in the stacking direction, the insulating layer being less likely to be etched than the second lower magnetic pole layer; carrying out a planarizing process by CMP on the entire wafer surface until the second lower magnetic pole layer is exposed; forming a concave portion including the second lower magnetic pole layer and the insulating layer by ion beam etching on the entire wafer surface; forming a recording gap layer over the entire wafer surface; and forming a first upper magnetic pole layer in the upper magnetic pole layer so as to fill the concave portion.
公开/授权文献
- US07828985B2 Method of producing thin film magnetic head 公开/授权日:2010-11-09
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