公开(公告)号：US07828985B2

公开(公告)日：2010-11-09

申请号：US11892773

申请日：2007-08-27

申请人： Yuji Ito ,  Hiraku Hirabayashi ,  Yoshiyuki Mizoguchi ,  Nobuya Oyama

发明人： Yuji Ito ,  Hiraku Hirabayashi ,  Yoshiyuki Mizoguchi ,  Nobuya Oyama

IPC分类号： C23F1/00 ,  B44C1/22 ,  H01L21/00 ,  H01L21/302

CPC分类号： G11B5/3163 ,  G11B5/00826

摘要： A method of producing a thin film magnetic head includes the steps of: forming a second lower magnetic pole layer in a part on a first lower magnetic pole layer; forming, over the entire wafer surface, an insulating layer so as to be thicker than the thickness of the second lower magnetic pole layer in the stacking direction, the insulating layer being less likely to be etched than the second lower magnetic pole layer; carrying out a planarizing process by CMP on the entire wafer surface until the second lower magnetic pole layer is exposed; forming a concave portion including the second lower magnetic pole layer and the insulating layer by ion beam etching on the entire wafer surface; forming a recording gap layer over the entire wafer surface; and forming a first upper magnetic pole layer in the upper magnetic pole layer so as to fill the concave portion.

摘要翻译： 一种制造薄膜磁头的方法包括以下步骤：在第一下磁极层的一部分上形成第二下磁极层; 在整个晶片表面上形成绝缘层，以便比层叠方向上的第二下磁极层的厚度厚，绝缘层比第二下磁极层更不易蚀刻; 在整个晶片表面上通过CMP进行平坦化处理，直到第二下磁极层露出; 在整个晶片表面上通过离子束蚀刻形成包括第二下磁极层和绝缘层的凹部; 在整个晶片表面上形成记录间隙层; 以及在所述上磁极层中形成第一上磁极层以填充所述凹部。

公开(公告)号：US20080087630A1

公开(公告)日：2008-04-17

申请号：US11892773

申请日：2007-08-27

申请人： Yuji Ito ,  Hiraku Hirabayashi ,  Yoshiyuki Mizoguchi ,  Nobuya Oyama

发明人： Yuji Ito ,  Hiraku Hirabayashi ,  Yoshiyuki Mizoguchi ,  Nobuya Oyama

IPC分类号： B44C1/22

CPC分类号： G11B5/3163 ,  G11B5/00826

摘要： A method of producing a thin film magnetic head includes the steps of: forming a second lower magnetic pole layer in a part on a first lower magnetic pole layer; forming, over the entire wafer surface, an insulating layer so as to be thicker than the thickness of the second lower magnetic pole layer in the stacking direction, the insulating layer being less likely to be etched than the second lower magnetic pole layer; carrying out a planarizing process by CMP on the entire wafer surface until the second lower magnetic pole layer is exposed; forming a concave portion including the second lower magnetic pole layer and the insulating layer by ion beam etching on the entire wafer surface; forming a recording gap layer over the entire wafer surface; and forming a first upper magnetic pole layer in the upper magnetic pole layer so as to fill the concave portion.

摘要翻译： 一种制造薄膜磁头的方法包括以下步骤：在第一下磁极层的一部分上形成第二下磁极层; 在整个晶片表面上形成绝缘层，以便比层叠方向上的第二下磁极层的厚度厚，绝缘层比第二下磁极层更不易蚀刻; 在整个晶片表面上通过CMP进行平坦化处理，直到第二下磁极层露出; 在整个晶片表面上通过离子束蚀刻形成包括第二下磁极层和绝缘层的凹部; 在整个晶片表面上形成记录间隙层; 以及在所述上磁极层中形成第一上磁极层以填充所述凹部。

公开(公告)号：US07924533B2

公开(公告)日：2011-04-12

申请号：US11740530

申请日：2007-04-26

申请人： Kazuhiko Maejima ,  Yoshiyuki Mizoguchi ,  Nobuya Oyama ,  Hiraku Hirabayashi ,  Hiroki Matsukuma ,  Naoto Matono

发明人： Kazuhiko Maejima ,  Yoshiyuki Mizoguchi ,  Nobuya Oyama ,  Hiraku Hirabayashi ,  Hiroki Matsukuma ,  Naoto Matono

IPC分类号： G11B5/33 ,  G11B5/127

CPC分类号： G11B5/584 ,  G11B5/00821

摘要： A multi-channel head includes a substrate, a plurality of write elements arranged in a track width direction above the substrate in a lamination direction, and a plurality of read elements arranged in the track width direction above the plurality of write elements in the lamination direction. At least one of the plurality of write elements is offset from the others in the lamination direction. All the plurality of read elements are located higher than an uppermost one of the plurality of write elements in the lamination direction.

摘要翻译： 多通道头包括基板，沿层叠方向布置在基板上方的轨道宽度方向上的多个写入元件，以及沿层叠方向在多个写入元件上方的轨道宽度方向上布置的多个读取元件 。 多个写入元件中的至少一个在层叠方向上偏离其它写入元件。 所有多个读取元件位于层叠方向上比多个写入元件中最上面的一个更高位置。

公开(公告)号：US20080112077A1

公开(公告)日：2008-05-15

申请号：US11868699

申请日：2007-10-08

申请人： Kazuhiko Maejima ,  Hiraku Hirabayashi ,  Yoshiyuki Mizoguchi ,  Nobuya Oyama

发明人： Kazuhiko Maejima ,  Hiraku Hirabayashi ,  Yoshiyuki Mizoguchi ,  Nobuya Oyama

IPC分类号： G11B5/187

CPC分类号： G11B5/584 ,  G11B5/00826

摘要： A multi-channel head includes at least one head chip. The head chip has a plurality of elements and at least one bonding interface, and the head chip has at least one element on one side of the bonding interface and at least one element on the other side of the bonding interface.

摘要翻译： 多通道头部包括至少一个头部芯片。 头芯片具有多个元件和至少一个接合界面，并且头部芯片在接合界面的一侧具有至少一个元件和在接合界面的另一侧上的至少一个元件。

公开(公告)号：US20070291411A1

公开(公告)日：2007-12-20

申请号：US11740530

申请日：2007-04-26

申请人： Kazuhiko MAEJIMA ,  Yoshiyuki Mizoguchi ,  Nobuya Oyama ,  Hiraku Hirabayashi ,  Hiroki Matsukuma ,  Naoto Matono

发明人： Kazuhiko MAEJIMA ,  Yoshiyuki Mizoguchi ,  Nobuya Oyama ,  Hiraku Hirabayashi ,  Hiroki Matsukuma ,  Naoto Matono

IPC分类号： G11B5/147

CPC分类号： G11B5/584 ,  G11B5/00821

摘要： A multi-channel head includes a substrate, a plurality of write elements arranged in a track width direction above the substrate in a lamination direction, and a plurality of read elements arranged in the track width direction above the plurality of write elements in the lamination direction. At least one of the plurality of write elements is offset from the others in the lamination direction. All the plurality of read elements are located higher than an uppermost one of the plurality of write elements in the lamination direction.

摘要翻译： 多通道头包括基板，沿层叠方向布置在基板上方的轨道宽度方向上的多个写入元件，以及沿层叠方向在多个写入元件上方的轨道宽度方向上布置的多个读取元件 。 多个写入元件中的至少一个在层叠方向上偏离其它写入元件。 所有多个读取元件位于层叠方向上比多个写入元件中最上面的一个更高位置。

公开(公告)号：US20050237673A1

公开(公告)日：2005-10-27

申请号：US11114035

申请日：2005-04-26

申请人： Yoshiyuki Mizoguchi ,  Kazuhide Yamada ,  Tsuyoshi Umehara ,  Nobuya Oyama ,  Soji Koide

发明人： Yoshiyuki Mizoguchi ,  Kazuhide Yamada ,  Tsuyoshi Umehara ,  Nobuya Oyama ,  Soji Koide

IPC分类号： B24B19/26 ,  G11B5/127 ,  G11B5/31 ,  G11B5/33

CPC分类号： G11B5/3173 ,  B24B19/26 ,  G11B5/3163 ,  G11B5/3166 ,  Y10T29/49004 ,  Y10T29/49048

摘要： A method is presented for grinding a surface of an elongate bar having a plurality of thin film magnetic elements aligned in a line, each of the thin film magnetic elements having a magnetoresistive sensor for reading a magnetic record from a recording medium and an inductive electromagnetic transducer for writing a magnetic record into the recording medium in a stacked structure, the surface of the bar being a grind surface so that it can be formed into an air-bearing surface by means of the grinding. The method has steps of providing first resistive films on the grind surface in advance along a first longitudinal line parallel to a longitudinal direction of the bar, and providing second resistive films on the grind surface in advance along a second longitudinal line parallel to the longitudinal direction of the bar. The method further has a step of grinding the grind surface while pressing the bar against a rotating grinding disc with the longitudinal direction of the bar positioned toward a radial direction of the grinding disc, measuring electric resistance values of the first and second resistive films, and controlling an amount that is ground of the grind surface in the longitudinal direction and a direction perpendicular to the longitudinal direction based on the electric resistance values of the first resistive film and the second resistive films.

摘要翻译： 提出了一种用于研磨细长条的表面的方法，所述细长条的表面具有排列成一行的多个薄膜磁性元件，每个薄膜磁性元件具有用于从记录介质读取磁记录的磁阻传感器和感应电磁换能器 为了以堆叠的结构将磁记录写入记录介质中，该条的表面是研磨表面，使得其可以通过研磨形成为空气轴承表面。 该方法具有以下步骤：沿着平行于条的纵向方向的第一纵向线预先在研磨表面上提供第一电阻膜，并且沿平行于纵向的第二纵向线预先在研磨表面上提供第二电阻膜 的酒吧。 该方法还具有如下步骤：在将棒压靠在旋转的研磨盘上的条件下研磨研磨表面，其中杆的纵向朝向研磨盘的径向方向，测量第一和第二电阻膜的电阻值，以及 基于第一电阻膜和第二电阻膜的电阻值，控制研磨表面在纵向方向上的垂直于纵向的方向的磨削量。

公开(公告)号：US20060007594A1

公开(公告)日：2006-01-12

申请号：US11128192

申请日：2005-05-13

申请人： Tsuyoshi Umehara ,  Norikazu Ota ,  Katsumichi Tagami ,  Hiroki Matsukuma ,  Nobuya Oyama ,  Soji Koide ,  Yoshiyuki Mizoguchi ,  Kazuhide Yamada

发明人： Tsuyoshi Umehara ,  Norikazu Ota ,  Katsumichi Tagami ,  Hiroki Matsukuma ,  Nobuya Oyama ,  Soji Koide ,  Yoshiyuki Mizoguchi ,  Kazuhide Yamada

IPC分类号： G11B5/147 ,  G11B5/127

CPC分类号： G11B5/6064 ,  G11B5/3133

摘要： The present invention relates to a thin-film magnetic head with a heater. A thin-film magnetic head includes a substrate, a magnetic read head element that has a shield area and is formed on the substrate, a magnetic write head element that has a pole area and is formed on the opposite side of the substrate with respect to the magnetic read head element, an overcoat layer that covers the magnetic read head element and the magnetic write head element and is formed on the substrate, a heater that heats at least during the magnetic read head element or the magnetic write head element in operation and is formed in the overcoat layer, and a slit area that splits the shield area in a shield length direction and is made of lower thermal conductivity material than the one of the shield area.

摘要翻译： 本发明涉及具有加热器的薄膜磁头。 薄膜磁头包括基板，具有屏蔽区域并形成在基板上的磁读头元件，具有磁极区域的磁写头元件，并相对于基板形成在基板的相对侧上 磁读头元件，覆盖磁读头元件和磁写头元件并形成在基片上的外涂层，至少在磁读头元件或写磁头元件工作期间加热的加热器，以及 形成在外涂层中，以及狭缝区域，其在屏蔽长度方向上分割屏蔽区域，并且由比该屏蔽区域中的一个更低的导热性材料制成。

公开(公告)号：US20050270694A1

公开(公告)日：2005-12-08

申请号：US11128305

申请日：2005-05-13

申请人： Tsuyoshi Umehara ,  Norikazu Ota ,  Katsumichi Tagami ,  Hiroki Matsukuma ,  Nobuya Oyama ,  Soji Koide ,  Yoshiyuki Mizoguchi ,  Kazuhide Yamada

发明人： Tsuyoshi Umehara ,  Norikazu Ota ,  Katsumichi Tagami ,  Hiroki Matsukuma ,  Nobuya Oyama ,  Soji Koide ,  Yoshiyuki Mizoguchi ,  Kazuhide Yamada

IPC分类号： G11B5/127 ,  G11B5/147 ,  G11B5/31 ,  G11B5/33 ,  G11B5/58

CPC分类号： G11B5/581 ,  G11B5/3106 ,  G11B5/3136 ,  G11B5/314 ,  G11B5/6064

摘要： A thin-film magnetic head according to the present invention comprises: a substrate; at least one magnetic head element formed on the substrate; an overcoat multilayer composed of a plurality of overcoat layers, formed on the substrate so as to cover the at least one magnetic head element; and at least one heating element to be heated at least during operation of the at least one magnetic head element, the at least one heating element provided in the overcoat multilayer, and a coefficient of thermal expansion of an overcoat layer located farthest from the substrate in the overcoat multilayer being smaller than a coefficient of thermal expansion of an overcoat layer located closest to the substrate in the overcoat multilayer.

摘要翻译： 根据本发明的薄膜磁头包括：基板; 形成在所述基板上的至少一个磁头元件; 形成在所述基板上以覆盖所述至少一个磁头元件的由多个外涂层构成的外涂层多层; 以及至少一个加热元件，至少在至少一个磁头元件的操作期间被加热，所述至少一个加热元件设置在外涂层多层中，以及位于最远离基底的外涂层的热膨胀系数 外涂层多层比在外涂层多层中最靠近基底的外涂层的热膨胀系数小。

公开(公告)号：US07384327B2

公开(公告)日：2008-06-10

申请号：US11114035

申请日：2005-04-26

申请人： Yoshiyuki Mizoguchi ,  Kazuhide Yamada ,  Tsuyoshi Umehara ,  Nobuya Oyama ,  Soji Koide

发明人： Yoshiyuki Mizoguchi ,  Kazuhide Yamada ,  Tsuyoshi Umehara ,  Nobuya Oyama ,  Soji Koide

IPC分类号： B24B49/00 ,  G11B5/23 ,  G01R31/28

CPC分类号： G11B5/3173 ,  B24B19/26 ,  G11B5/3163 ,  G11B5/3166 ,  Y10T29/49004 ,  Y10T29/49048

摘要： A method is presented for grinding a surface of an elongate bar having a plurality of thin film magnetic elements aligned in a line, each of the thin film magnetic elements having a magnetoresistive sensor for reading a magnetic record from a recording medium and an inductive electromagnetic transducer for writing a magnetic record into the recording medium in a stacked structure, the surface of the bar being a grind surface so that it can be formed into an air-bearing surface by means of the grinding. The method has steps of providing first resistive films on the grind surface in advance along a first longitudinal line parallel to a longitudinal direction of the bar, and providing second resistive films on the grind surface in advance along a second longitudinal line parallel to the longitudinal direction of the bar. The method further has a step of grinding the grind surface while pressing the bar against a rotating grinding disc with the longitudinal direction of the bar positioned toward a radial direction of the grinding disc, measuring electric resistance values of the first and second resistive films, and controlling an amount that is ground of the grind surface in the longitudinal direction and a direction perpendicular to the longitudinal direction based on the electric resistance values of the first resistive film and the second resistive films.

摘要翻译： 提出了一种用于研磨细长条的表面的方法，所述细长条的表面具有排列成一行的多个薄膜磁性元件，每个薄膜磁性元件具有用于从记录介质读取磁记录的磁阻传感器和感应电磁换能器 为了以堆叠的结构将磁记录写入记录介质中，该条的表面是研磨表面，使得其可以通过研磨形成为空气轴承表面。 该方法具有以下步骤：沿着平行于条的纵向方向的第一纵向线预先在研磨表面上提供第一电阻膜，并且沿平行于纵向的第二纵向线预先在研磨表面上提供第二电阻膜 的酒吧。 该方法还具有如下步骤：在将棒压靠在旋转的研磨盘上的条件下研磨研磨表面，其中杆的纵向朝向研磨盘的径向方向，测量第一和第二电阻膜的电阻值，以及 基于第一电阻膜和第二电阻膜的电阻值，控制研磨表面在纵向方向上的垂直于纵向的方向的磨削量。

公开(公告)号：US08015693B2

公开(公告)日：2011-09-13

申请号：US11907910

申请日：2007-10-18

申请人： Hiraku Hirabayashi ,  Yoshiyuki Mizoguchi

发明人： Hiraku Hirabayashi ,  Yoshiyuki Mizoguchi

IPC分类号： G11B5/187

CPC分类号： G11B5/3163 ,  G11B5/3116 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method of forming a thin-film magnetic head comprises a lower magnetic pole layer forming step of forming a lower magnetic pole layer; a lower magnetic pole projection forming step of forming the lower magnetic pole layer with a lower magnetic pole projection; a gap layer forming step of laminating a nonmagnetic gap layer on the lower magnetic pole projection; and an upper magnetic pole forming step of forming an upper magnetic pole on the nonmagnetic gap layer. The lower magnetic pole projection forming step forms the lower magnetic pole projection by simultaneously etching an area including parts adjacent to a part to become the lower magnetic pole projection on both sides in a track width direction and a part adjacent to the part to become the lower magnetic pole projection on the side opposite from a medium-opposing surface in a surface of the lower magnetic pole layer.

摘要翻译： 形成薄膜磁头的方法包括形成下磁极层的下磁极层形成步骤; 下磁极突起形成步骤，用下磁极突起形成下磁极层; 间隙层形成步骤，在所述下磁极突起上层叠非磁性间隙层; 以及在非磁性间隙层上形成上部磁极的上部磁极形成工序。 下磁极投影形成步骤通过同时蚀刻包括与零件相邻的部分的区域形成下磁极突起，以在轨道宽度方向上的两侧成为下部磁极突起，并且与该部分相邻的部分成为下部磁极突起 磁极突起在与下磁极层的表面中的与介质相对的表面相对的一侧上。