发明申请
- 专利标题: Field effect transistor with thin gate electrode and method of fabricating same
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申请号: US11549311申请日: 2006-10-13
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公开(公告)号: US20080090367A1公开(公告)日: 2008-04-17
- 发明人: Brent Alan Anderson , Andres Bryant , William F. Clark , Edward Joseph Nowak
- 申请人: Brent Alan Anderson , Andres Bryant , William F. Clark , Edward Joseph Nowak
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A field effect transistor and a method of fabricating the field effect transistor. The field effect transistor includes: a silicon body, a perimeter of the silicon body abutting a dielectric isolation; a source and a drain formed in the body and on opposite sides of a channel formed in the body; and a gate dielectric layer between the body and an electrically conductive gate electrode, a bottom surface of the gate dielectric layer in direct physical contact with a top surface of the body and a bottom surface the gate electrode in direct physical contact with a top surface of the gate dielectric layer, the gate electrode having a first region having a first thickness and a second region having a second thickness, the first region extending along the top surface of the gate dielectric layer over the channel region, the second thickness greater than the first thickness.
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