发明申请
- 专利标题: MICRO-CAVITY MEMS DEVICE AND METHOD OF FABRICATING SAME
- 专利标题(中): 微孔MEMS器件及其制造方法
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申请号: US11968896申请日: 2008-01-03
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公开(公告)号: US20080092367A1公开(公告)日: 2008-04-24
- 发明人: Louis Hsu , Lawrence Clevenger , Timothy Dalton , Carl Radens , Keith Wong , Chih-Chao Yang
- 申请人: Louis Hsu , Lawrence Clevenger , Timothy Dalton , Carl Radens , Keith Wong , Chih-Chao Yang
- 申请人地址: US NY Armonk 10504
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk 10504
- 主分类号: H01H11/00
- IPC分类号: H01H11/00 ; H01F41/04
摘要:
A method of fabricating a MEMS switch having a free moving inductive element within in micro-cavity guided by at least one inductive coil. The switch consists of an upper inductive coil at one end of a micro-cavity; optionally, a lower inductive coil; and a free-moving inductive element preferably made of magnetic material. The coils are provided with an inner permalloy core. Switching is achieved by passing a current through the upper coil, inducing a magnetic field unto the inductive element. The magnetic field attracts the free-moving inductive element upwards, shorting two open conductive wires, closing the switch. When the current flow stops or is reversed, the free-moving magnetic element drops back by gravity to the bottom of the micro-cavity and the conductive wires open. When the chip is not mounted with the correct orientation, the lower coil pulls the free-moving inductive element back at its original position.
公开/授权文献
- US07726010B2 Method of forming a micro-electromechanical (MEMS) switch 公开/授权日:2010-06-01