发明申请
US20080105874A1 THIN FILM TRANSISTOR, MANUFACTURING METHOD THEREOF, AND TFT LCD USING THE SAME
有权
薄膜晶体管,其制造方法和使用其的TFT LCD
- 专利标题: THIN FILM TRANSISTOR, MANUFACTURING METHOD THEREOF, AND TFT LCD USING THE SAME
- 专利标题(中): 薄膜晶体管,其制造方法和使用其的TFT LCD
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申请号: US11935073申请日: 2007-11-05
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公开(公告)号: US20080105874A1公开(公告)日: 2008-05-08
- 发明人: Wei WANG , Hongjiang Wu , Chunping Long , Chang Hee Lee
- 申请人: Wei WANG , Hongjiang Wu , Chunping Long , Chang Hee Lee
- 优先权: CN2006101380446 20061103
- 主分类号: H01L29/04
- IPC分类号: H01L29/04 ; H01L21/336
摘要:
A thin film transistor (TFT) that comprises a gate electrode on a substrate, a gate insulation layer on the gate electrode, an active layer having a source region, a drain region, and a channel region on the gate insulation layer, and a source electrode and a drain electrode formed over the source region and drain region of the active layer respectively and facing each other with respect to the channel region. The profile of channel region between the source electrode and drain electrode is changed in a bend line. A method for forming the TFT is also provided.
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