发明申请
- 专利标题: Anti-reflective seed layers for the fabrication of wrap around and trailing shields
- 专利标题(中): 抗反射种子层,用于制造包裹和后盾
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申请号: US11595765申请日: 2006-11-10
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公开(公告)号: US20080113090A1公开(公告)日: 2008-05-15
- 发明人: Hieu Lam , Patrick Rush Webb , Yi Zheng
- 申请人: Hieu Lam , Patrick Rush Webb , Yi Zheng
- 主分类号: B05D5/12
- IPC分类号: B05D5/12
摘要:
Methods and structures for the fabrication of wrap around and trailing shield structures are disclosed. Seed layers having anti-reflective properties are utilized, eliminating the need to deposit, then remove, traditional inorganic anti-reflection coatings prior to shield plating.
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