发明申请
US20080116917A1 PROBE SUPPORT AND PROCESS FOR THE EXAMINATION OF TEST SUBSTRATES UNDER USE OF PROBE SUPPORTS 有权
在使用探测支持下检测测试基板的探测支持和过程

PROBE SUPPORT AND PROCESS FOR THE EXAMINATION OF TEST SUBSTRATES UNDER USE OF PROBE SUPPORTS
摘要:
A probe support for holding probes which serve for electrical contacting of test substrates in a prober for testing purposes is specified. A process for testing test substrates in such a prober is also specified. The probe support comprises a probe card holder, a probe card, and a probe card adapter, where the probe card and probe card adapter are electrically connected to one another as well as to a shield of electrically conductive material and are disposed in such a manner that the probe card lies in a passageway of a shield. The shield is disposed between the test substrates and the probe card holder and is electrically insulated from it. For testing test substrates their positioning with respect to the probes held in this manner is done by angular alignment of the contact surfaces of the test substrates to the sensor tips and the movement of the test substrates along a path which starts from a first reference position and is composed up to the first, and each additional, contact position of an x-component and a y-component (FIG. 2).
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