发明申请
- 专利标题: PROBE SUPPORT AND PROCESS FOR THE EXAMINATION OF TEST SUBSTRATES UNDER USE OF PROBE SUPPORTS
- 专利标题(中): 在使用探测支持下检测测试基板的探测支持和过程
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申请号: US11940354申请日: 2007-11-15
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公开(公告)号: US20080116917A1公开(公告)日: 2008-05-22
- 发明人: Stojan Kanev , Hans-Jurgen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
- 申请人: Stojan Kanev , Hans-Jurgen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
- 申请人地址: DE Sacka
- 专利权人: SUSS MicroTec Test Systems GmbH
- 当前专利权人: SUSS MicroTec Test Systems GmbH
- 当前专利权人地址: DE Sacka
- 优先权: DE102006054693.8 20061117
- 主分类号: G01R31/02
- IPC分类号: G01R31/02
摘要:
A probe support for holding probes which serve for electrical contacting of test substrates in a prober for testing purposes is specified. A process for testing test substrates in such a prober is also specified. The probe support comprises a probe card holder, a probe card, and a probe card adapter, where the probe card and probe card adapter are electrically connected to one another as well as to a shield of electrically conductive material and are disposed in such a manner that the probe card lies in a passageway of a shield. The shield is disposed between the test substrates and the probe card holder and is electrically insulated from it. For testing test substrates their positioning with respect to the probes held in this manner is done by angular alignment of the contact surfaces of the test substrates to the sensor tips and the movement of the test substrates along a path which starts from a first reference position and is composed up to the first, and each additional, contact position of an x-component and a y-component (FIG. 2).
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