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    Probe support with shield for the examination of test substrates under use of probe supports
    1.
    发明授权
    Probe support with shield for the examination of test substrates under use of probe supports 有权
    使用探头支架检测测试基板的探头支架

    公开(公告)号：US07652491B2

    公开(公告)日：2010-01-26

    申请号：US11940354

    申请日：2007-11-15

    申请人： Stojan Kanev ,  Hans-Jurgen Fleischer ,  Stefan Kreissig ,  Karsten Stoll ,  Axel Schmidt ,  Andreas Kittlaus

    发明人： Stojan Kanev ,  Hans-Jurgen Fleischer ,  Stefan Kreissig ,  Karsten Stoll ,  Axel Schmidt ,  Andreas Kittlaus

    IPC分类号： G10R31/28

    CPC分类号： G01R31/2889 ,  G01R1/07342

    摘要： A probe support for holding probes which serve for electrical contacting of test substrates in a prober for testing purposes comprises a probe card holder, a probe card, and a probe card adapter, The probe card and probe card adapter are electrically connected to one another as well as to a shield of electrically conductive material and are disposed such that the probe card lies in a passageway of a shield. The shield is disposed between the test substrates and the probe card holder and is electrically insulated from the holder. For testing test substrates their positioning with respect to the probes held in this manner is done by angular alignment of the contact surfaces of the test substrates to the sensor tips and the movement of the test substrates along a path which starts from a first reference position and is composed up to the first, and each additional, contact position of an x-component and a y-component.

    摘要翻译： 用于保持探头的探针支架用于探测器中的测试基板的电接触以用于测试目的包括探针卡夹，探针卡和探针卡适配器。探针卡和探针卡适配器彼此电连接为 以及导电材料的屏蔽件，并且被布置成使得探针卡位于屏蔽件的通道中。 屏蔽件设置在测试基板和探针卡座之间并且与保持器电绝缘。 为了测试测试基板，它们相对于以这种方式保持的探针的定位是通过将测试基板的接触表面与传感器尖端角度对准并沿着从第一参考位置开始的路径移动测试基板来进行的， 由x分量和y分量组成直到第一个和每个附加的接触位置。

    PROBE SUPPORT AND PROCESS FOR THE EXAMINATION OF TEST SUBSTRATES UNDER USE OF PROBE SUPPORTS
    3.
    发明申请
    PROBE SUPPORT AND PROCESS FOR THE EXAMINATION OF TEST SUBSTRATES UNDER USE OF PROBE SUPPORTS 有权
    在使用探测支持下检测测试基板的探测支持和过程

    公开(公告)号：US20080116917A1

    公开(公告)日：2008-05-22

    申请号：US11940354

    申请日：2007-11-15

    申请人： Stojan Kanev ,  Hans-Jurgen Fleischer ,  Stefan Kreissig ,  Karsten Stoll ,  Axel Schmidt ,  Andreas Kittlaus

    发明人： Stojan Kanev ,  Hans-Jurgen Fleischer ,  Stefan Kreissig ,  Karsten Stoll ,  Axel Schmidt ,  Andreas Kittlaus

    IPC分类号： G01R31/02

    CPC分类号： G01R31/2889 ,  G01R1/07342

    摘要： A probe support for holding probes which serve for electrical contacting of test substrates in a prober for testing purposes is specified. A process for testing test substrates in such a prober is also specified. The probe support comprises a probe card holder, a probe card, and a probe card adapter, where the probe card and probe card adapter are electrically connected to one another as well as to a shield of electrically conductive material and are disposed in such a manner that the probe card lies in a passageway of a shield. The shield is disposed between the test substrates and the probe card holder and is electrically insulated from it. For testing test substrates their positioning with respect to the probes held in this manner is done by angular alignment of the contact surfaces of the test substrates to the sensor tips and the movement of the test substrates along a path which starts from a first reference position and is composed up to the first, and each additional, contact position of an x-component and a y-component (FIG. 2).

    摘要翻译： 规定了用于保持探头的探针支架，用于检测探针中的测试基板的电接触用于测试目的。 还规定了用于在这种探测器中测试测试底物的方法。 探针支架包括探针卡夹，探针卡和探针卡适配器，其中探针卡和探针卡适配器彼此电连接以及导电材料的屏蔽，并以这种方式设置 探针卡位于屏蔽的通道中。 屏蔽件设置在测试基板和探针卡保持器之间并且与其电绝缘。 为了测试测试基板，它们相对于以这种方式保持的探针的定位是通过将测试基板的接触表面与传感器尖端角度对准并沿着从第一参考位置开始的路径移动测试基板来进行的， 由x分量和y分量（图2）组成直到第一个和每个附加的接触位置。

    METHOD AND ARRANGEMENT FOR POSITIONING A PROBE CARD
    5.
    发明申请
    METHOD AND ARRANGEMENT FOR POSITIONING A PROBE CARD 审中-公开
    定位探针卡的方法和布置

    公开(公告)号：US20090021275A1

    公开(公告)日：2009-01-22

    申请号：US11947129

    申请日：2007-11-29

    申请人： Stojan Kanev ,  Hans-Jurgen Fleischer ,  Stefan Kreissig ,  Jorg Kiesewetter

    发明人： Stojan Kanev ,  Hans-Jurgen Fleischer ,  Stefan Kreissig ,  Jorg Kiesewetter

    IPC分类号： G01R1/067 ,  G01R31/02

    CPC分类号： G01R31/2891 ,  G01R31/2887

    摘要： A method for perpendicular positioning of a probe card relative to a test substrate, includes storing a separation position approached in a first positioning step as a distance between the needle tips of the probe card and the substrate, storing a contact position approached in a second positioning step until the probe card contacts the substrate, and displaying an image of the needle tips. For avoiding erroneous operation after a probe card has been changed, when imaging the needle tips, the stored contact position is imaged and is changed until presentation of this contact position corresponds to actual height of the tips appropriate for the respective probe card and this setting is then stored as a new contact position. A display device presents the needle tips and the stored contact position and is connected to a memory, a recording device and an input device which changes the contact position.

    摘要翻译： 一种用于相对于测试基板垂直定位探针卡的方法，包括将在第一定位步骤中接近的分离位置存储为探针卡的针尖与基底之间的距离，存储在第二定位中接近的接触位置 一直到探针卡接触基板，并显示针尖的图像。 为了避免在探针卡改变之后的错误操作，当成像针尖时，存储的接触位置成像并改变，直到该接触位置的呈现对应于适合于相应探针卡的尖端的实际高度，并且该设置为 然后存储为新的联系人位置。 显示装置呈现针尖和存储的接触位置，并且连接到存储器，记录装置和改变接触位置的输入装置。

    Method and prober for contacting a contact area with a contact tip
    6.
    发明申请
    Method and prober for contacting a contact area with a contact tip 有权
    用于将接触区域与接触尖端接触的方法和探测器

    公开(公告)号：US20050007135A1

    公开(公告)日：2005-01-13

    申请号：US10879622

    申请日：2004-06-29

    申请人： Stefan Schneidewind ,  Claus Dietrich ,  Jorg Kiesewetter ,  Stojan Kanev ,  Stefan Kreissig ,  Frank Fehrmann ,  Hans-Jurgen Fleischer

    发明人： Stefan Schneidewind ,  Claus Dietrich ,  Jorg Kiesewetter ,  Stojan Kanev ,  Stefan Kreissig ,  Frank Fehrmann ,  Hans-Jurgen Fleischer

    IPC分类号： G01R31/28 ,  G01R31/02

    CPC分类号： G01R31/2886

    摘要： A method of contacting a contact area with the tip of a contact needle (contact tip) in a prober and the arrangement of such a prober, is based on the object of ensuring reliable contacting and direct observation of the establishment of the contact between the contact tip and the contact area when contacting contact pads of small dimensions. The prober substantially includes a base frame with a movement device including a clamping fixture for receiving a semiconductor wafer and also contact needles, which are arranged opposite the free surface of the semiconductor wafer. The contacting of the contact tips initially requires a horizontal positioning of the semiconductor wafer, so that the contact area and the contact tip are one above the other and at a distance from each other, and subsequently moving vertically in the direction of the contact tip, until a contact of the contact tips with the contact area is established. The object is achieved by the vertical movement of the semiconductor wafer until the end position is reached being directly observed in a horizontal direction of observation and, for this purpose, an observation device is arranged in such a way that the observation axis runs in the spacing above the free wafer surface.

    摘要翻译： 接触区域与探针中的接触针尖（接触尖端）接触的方法以及这种探测器的布置的方法基于确保可靠接触和直接观察触点之间的接触的建立的目的 接触小尺寸接触垫时的接触面和接触面积。 探测器基本上包括具有移动装置的基架，该移动装置包括用于接收半导体晶片的夹持夹具以及与半导体晶片的自由表面相对布置的接触针。 接触尖端的接触最初需要半导体晶片的水平定位，使得接触面和接触尖端彼此之间并且彼此间隔一定距离，随后沿接触尖端的方向垂直移动， 直到接触尖端与接触区域的接触被建立。 该目的是通过半导体晶片的垂直移动直到达到最终位置在水平观察方向上直接观察为目的，为此目的，观察装置以这样的方式布置，使得观察轴以间隔 在自由晶片表面上方。

    Procedure for reproduction of a calibration position of an aligned and afterwards displaced calibration substrate in a probe station
    7.
    发明申请
    Procedure for reproduction of a calibration position of an aligned and afterwards displaced calibration substrate in a probe station 有权
    在探测台中再现对准的和之后移位的校准基板的校准位置的步骤

    公开(公告)号：US20060212248A1

    公开(公告)日：2006-09-21

    申请号：US11365424

    申请日：2006-03-01

    申请人： Joerg Kiesewetter ,  Axel Schmidt ,  Stefan Kreissig ,  Karsten Stoll ,  Ralph Juettner ,  Hans-Juergen Fleischer

    发明人： Joerg Kiesewetter ,  Axel Schmidt ,  Stefan Kreissig ,  Karsten Stoll ,  Ralph Juettner ,  Hans-Juergen Fleischer

    IPC分类号： G01C17/38

    CPC分类号： G01R31/2891

    摘要： A wafer probe station is provided with a wafer chuck, a wafer fastened on the chuck by vacuum suction, and a probe needle arrangement above the wafer to test the wafer at high frequencies by contacting selected pads on the wafer and alternately pads on a calibration substrate also fastened on the wafer chuck. A procedure for reproduction of a calibration position of an aligned and afterwards displaced calibration substrate uses first and second measurement systems to calculate a new offset position of the calibration substrate after a second wafer is loaded on the wafer chuck. In a last step, the wafer chuck is driven by a 4axis manipulator stage to the new calibration position from the recent position.

    摘要翻译： 晶片探针台设置有晶片卡盘，通过真空吸附紧固在卡盘上的晶片，以及在晶片上方的探针针布置，以通过接触晶片上的选定的焊盘并在校准基板上交替地焊接来高速测试晶片 也固定在晶片卡盘上。 用于再现对准的和随后移位的校准基板的校准位置的过程使用第一和第二测量系统来计算在第二晶片装载在晶片卡盘上之后校准基板的新偏移位置。 在最后一步中，晶片卡盘由最近的位置由4轴的机械手级驱动到新的校准位置。

    Procedure for reproduction of a calibration position of an aligned and afterwards displaced calibration substrate in a probe station
    8.
    发明授权
    Procedure for reproduction of a calibration position of an aligned and afterwards displaced calibration substrate in a probe station 有权
    在探测台中再现对准的和之后移位的校准基板的校准位置的步骤

    公开(公告)号：US07265536B2

    公开(公告)日：2007-09-04

    申请号：US11365424

    申请日：2006-03-01

    申请人： Joerg Kiesewetter ,  Axel Schmidt ,  Stefan Kreissig ,  Karsten Stoll ,  Ralph Juettner ,  Hans-Juergen Fleischer

    发明人： Joerg Kiesewetter ,  Axel Schmidt ,  Stefan Kreissig ,  Karsten Stoll ,  Ralph Juettner ,  Hans-Juergen Fleischer

    IPC分类号： G01R31/02 ,  G01R35/00

    CPC分类号： G01R31/2891

    摘要： A wafer probe station is provided with a wafer chuck, a wafer fastened on the chuck by vacuum suction, and a probe needle arrangement above the wafer to test the wafer at high frequencies by contacting selected pads on the wafer and alternately pads on a calibration substrate also fastened on the wafer chuck. A procedure for reproduction of a calibration position of an aligned and afterwards displaced calibration substrate uses first and second measurement systems to calculate a new offset position of the calibration substrate after a second wafer is loaded on the wafer chuck. In a last step, the wafer chuck is driven by a 4axis manipulator stage to the new calibration position from the recent position.

    摘要翻译： 晶片探针台设置有晶片卡盘，通过真空吸附紧固在卡盘上的晶片，以及在晶片上方的探针针布置，以通过接触晶片上的选定的焊盘并在校准基板上交替地焊接来高速测试晶片 也固定在晶片卡盘上。 用于再现对准的和随后移位的校准基板的校准位置的过程使用第一和第二测量系统来计算在第二晶片装载在晶片卡盘上之后校准基板的新偏移位置。 在最后一步中，晶片卡盘由最近的位置由4轴的机械手级驱动到新的校准位置。

    Probe holder for a probe for testing semiconductor components
    9.
    发明授权
    Probe holder for a probe for testing semiconductor components 有权
    用于测试半导体元件的探头的探头支架

    公开(公告)号：US07579849B2

    公开(公告)日：2009-08-25

    申请号：US11674430

    申请日：2007-02-13

    申请人： Jorg Kiesewetter ,  Stefan Kreissig ,  Stojan Kanev

    发明人： Jorg Kiesewetter ,  Stefan Kreissig ,  Stojan Kanev

    IPC分类号： G01R31/02

    CPC分类号： G01R1/06705 ,  G01R1/0675

    摘要： A probe holder in which the probe needle has a slight horizontal offset under the action of a vertical force, includes a probe holder for a probe needle, wherein the holder is adapted, for fastening and electrical contact-connection, on a carrier device of a test apparatus and has a holder arm having a needle holder at the free end thereof to fasten the probe needle, and a fastening arm for connecting the probe holder to the carrier device. The holder arm and the fastening arm are connected to one another by an articulated joint, whereby horizontal offset of the needle tip on account of external forces can be reduced or even prevented by increasing the radius of the yielding movement of the probe needle.

    摘要翻译： 探针支架，其中探针在垂直力的作用下具有轻微的水平偏移，包括用于探针的探针支架，其中该支架适于紧固和电接触连接在载体装置上 测试装置，并且具有在其自由端具有针保持器的保持臂，用于固定探针，以及用于将探针保持器连接到载体装置的紧固臂。 保持臂和紧固臂通过铰接接头彼此连接，由此可以通过增加探针的屈服运动的半径来减小或甚至防止由于外力引起的针尖的水平偏移。

    MICROMANIPULATOR FOR MOVING A PROBE
    10.
    发明申请
    MICROMANIPULATOR FOR MOVING A PROBE 审中-公开
    用于移动探头的微型计算机

    公开(公告)号：US20090049944A1

    公开(公告)日：2009-02-26

    申请号：US12022261

    申请日：2008-01-30

    申请人： Jorg Kiesewetter ,  Stojan Kanev ,  Lutz Junker ,  Stefan Kreissig

    发明人： Jorg Kiesewetter ,  Stojan Kanev ,  Lutz Junker ,  Stefan Kreissig

    IPC分类号： B25J7/00

    CPC分类号： B25J7/00 ,  B25J9/144 ,  G01R1/06705 ,  Y10T74/20207

    摘要： A micromanipulator for moving a probe comprises two elements which are mechanically connected to one another in such a way that one element can be moved relative to other element. The movement of the element occurs as a result of the pressure change of a fluid which acts upon an actuator which is in mechanical contact to a mobile element or to an element moving on a surface segment.

    摘要翻译： 用于移动探针的显微操纵器包括两个元件，这两个元件以相对于其它元件移动一个元件的方式彼此机械连接。 元件的运动是由于作用在致动器上的流体的压力变化的结果，该致动器机械地接触到移动元件或者在表面段上移动的元件。