发明申请
- 专利标题： Segmented Grating Alignment Device
- 专利标题（中）： 分段光栅对准装置
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申请号： US11791695申请日： 2005-01-17
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公开(公告)号： US20080123105A1公开(公告)日： 2008-05-29
- 发明人: Kouji Seki , Jiro Suzuki , Yoshihito Hirano , Yutaka Ezaki , Yasushi Horiuchi , Masaki Tabata , Kouji Namura , Izumi Mikami
- 申请人： Kouji Seki , Jiro Suzuki , Yoshihito Hirano , Yutaka Ezaki , Yasushi Horiuchi , Masaki Tabata , Kouji Namura , Izumi Mikami
- 国际申请： PCT/JP05/00484 WO 20050117
- 主分类号： G01B9/02
- IPC分类号： G01B9/02
摘要：
A grating alignment device performs alignment of two or more plane gratings so as to eliminate an angular misalignment and a phase misalignment which are caused between respective diffracted light beams generated when incident light is diffracted by the plane gratings. Specifically, alignment is performed by appropriately adjusting an angle A, an angle B, an angle C, a coordinate Z, and a coordinate X of the second plane grating so as to eliminate at least one of the angular misalignment and the phase misalignment which are caused between the respective diffracted light beams generated when incident light is diffracted by the first plane grating and the second plane grating.
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