公开(公告)号：US07768699B2

公开(公告)日：2010-08-03

申请号：US11658315

申请日：2004-08-20

申请人： Jiro Suzuki ,  Yoshihito Hirano ,  Yutaka Ezaki ,  Yasushi Horiuchi ,  Masaki Tabata ,  Kouji Namura ,  Izumi Mikami

发明人： Jiro Suzuki ,  Yoshihito Hirano ,  Yutaka Ezaki ,  Yasushi Horiuchi ,  Masaki Tabata ,  Kouji Namura ,  Izumi Mikami

IPC分类号： H01S3/00 ,  G02B5/28 ,  G01B9/02

CPC分类号： G01J9/02

摘要： A phase difference detecting device includes a splitter for splitting laser beams into a first group which will travel along a first path and a second group which will travel along a second path, a beam selection/extraction unit for selecting, as reference light, one beam from the first group to allow it to pass therethrough, a path length changing unit for changing the length of the first path, a combining unit for combining the reference light and beams which construct the second group to produce interference light, and a detector for detecting the intensity of the interference light. The device changes the length of the first path using the path length changing unit to detect a path length which maximizes the intensity of the interference light for each of the beams which construct the second group, and determines a phase difference among the beams from the detected path length.

摘要翻译： 相位差检测装置包括：分离器，用于将激光束分成沿着第一路径行进的第一组和将沿着第二路径行进的第二组;波束选择/提取单元，用于选择一个波束 从第一组允许其通过，用于改变第一路径的长度的路径长度改变单元，用于组合参考光的组合单元和构成第二组的波束产生干涉光;以及检测器，用于检测 干涉光的强度。 该装置使用路径长度改变单元改变第一路径的长度，以检测使构成第二组的每个波束的干扰光的强度最大化的路径长度，并且确定来自检测到的波束之间的相位差 路径长度。

公开(公告)号：US20080123105A1

公开(公告)日：2008-05-29

申请号：US11791695

申请日：2005-01-17

申请人： Kouji Seki ,  Jiro Suzuki ,  Yoshihito Hirano ,  Yutaka Ezaki ,  Yasushi Horiuchi ,  Masaki Tabata ,  Kouji Namura ,  Izumi Mikami

发明人： Kouji Seki ,  Jiro Suzuki ,  Yoshihito Hirano ,  Yutaka Ezaki ,  Yasushi Horiuchi ,  Masaki Tabata ,  Kouji Namura ,  Izumi Mikami

IPC分类号： G01B9/02

CPC分类号： G02B27/4233 ,  G02B27/62 ,  G02F2201/305

摘要： A grating alignment device performs alignment of two or more plane gratings so as to eliminate an angular misalignment and a phase misalignment which are caused between respective diffracted light beams generated when incident light is diffracted by the plane gratings. Specifically, alignment is performed by appropriately adjusting an angle A, an angle B, an angle C, a coordinate Z, and a coordinate X of the second plane grating so as to eliminate at least one of the angular misalignment and the phase misalignment which are caused between the respective diffracted light beams generated when incident light is diffracted by the first plane grating and the second plane grating.

摘要翻译： 光栅对准装置执行两个或更多个平面光栅的对准，以消除当入射光被平面光栅衍射时产生的各衍射光束之间产生的角度偏移和相位未对准。 具体而言，通过适当地调整第二平面光栅的角度A，角度B，角度C，坐标Z和坐标X来进行对准，以消除角度偏移和相位未对准中的至少一个 当入射光被第一平面光栅和第二平面光栅衍射时产生的各衍射光束之间产生。

公开(公告)号：US20080304139A1

公开(公告)日：2008-12-11

申请号：US11658315

申请日：2004-08-20

申请人： Jiro Suzuki ,  Yoshihito Hirano ,  Yutaka Ezaki ,  Yasushi Horiuchi ,  Masaki Tabata ,  Kouji Namura ,  Izumi Mikami

发明人： Jiro Suzuki ,  Yoshihito Hirano ,  Yutaka Ezaki ,  Yasushi Horiuchi ,  Masaki Tabata ,  Kouji Namura ,  Izumi Mikami

IPC分类号： H01S3/13 ,  G01J9/02

CPC分类号： G01J9/02

摘要： A phase difference detecting device includes a splitter for splitting laser beams into a first group which will travel along a first path and a second group which will travel along a second path, a beam selection/extraction unit for selecting, as reference light, one beam from the first group to allow it to pass therethrough, a path length changing unit for changing the length of the first path, a combining unit for combining the reference light and beams which construct the second group to produce interference light, and a detector for detecting the intensity of the interference light. The device changes the length of the first path using the path length changing unit to detect a path length which maximizes the intensity of the interference light for each of the beams which construct the second group, and determines a phase difference among the beams from the detected path length.

摘要翻译： 相位差检测装置包括：分离器，用于将激光束分成沿着第一路径行进的第一组和将沿着第二路径行进的第二组;波束选择/提取单元，用于选择一个波束 从第一组允许其通过，用于改变第一路径的长度的路径长度改变单元，用于组合参考光的组合单元和构成第二组的波束产生干涉光;以及检测器，用于检测 干涉光的强度。 该装置使用路径长度改变单元改变第一路径的长度，以检测使构成第二组的每个波束的干扰光的强度最大化的路径长度，并且确定来自检测到的波束之间的相位差 路径长度。