发明申请
- 专利标题: METHOD OF METALLIZING A SOLAR CELL SUBSTRATE
- 专利标题(中): 金属化太阳能电池基板的方法
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申请号: US11566201申请日: 2006-12-01
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公开(公告)号: US20080128019A1公开(公告)日: 2008-06-05
- 发明人: Sergey LOPATIN , Nicolay Y. Kovarsky , David Eaglesham , John O. Dukovic , Charles Gay
- 申请人: Sergey LOPATIN , Nicolay Y. Kovarsky , David Eaglesham , John O. Dukovic , Charles Gay
- 专利权人: APPLIED MATERIALS, INC.
- 当前专利权人: APPLIED MATERIALS, INC.
- 主分类号: H01L31/00
- IPC分类号: H01L31/00 ; C25D5/10 ; C25D5/12
摘要:
Embodiments of the invention contemplate the formation of a low cost solar cell using a novel high speed electroplating method and apparatus to form a metal contact structure having selectively formed metal lines using an electrochemical plating process. The apparatus and methods described herein remove the need to perform one or more high temperature screen printing processes to form conductive features on the surface of a solar cell substrate. The resistance of interconnects formed in a solar cell device greatly affects the efficiency of the solar cell. It is thus desirable to form a solar cell device that has a low resistance connection that is reliable and cost effective. Therefore, one or more embodiments of the invention described herein are adapted to form a low cost and reliable interconnecting layer using an electrochemical plating process containing a common metal, such as copper.
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