发明申请
US20080150006A1 Using implanted poly-1 to improve charging protection in dual-poly process 有权
使用植入poly-1改善双重聚合过程中的充电保护

Using implanted poly-1 to improve charging protection in dual-poly process
摘要:
The present invention pertains to implementing a dual poly process in forming a transistor based memory device. The process allows a first polysilicon layer to be selectively doped subsequent to deposition of the second polysilicon layer. The doping increases the conductivity of the first polysilicon layer which can achieve a more robust charging protection for multi-bit core array and a more uniform distribution of charge.
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