发明申请
- 专利标题: CONTAINER TRANSPORT SYSTEM AND MEASUREMENT CONTAINER
- 专利标题(中): 集装箱运输系统和测量容器
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申请号: US11962719申请日: 2007-12-21
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公开(公告)号: US20080156069A1公开(公告)日: 2008-07-03
- 发明人: Masanao Murata , Susumu Maetaki
- 申请人: Masanao Murata , Susumu Maetaki
- 申请人地址: JP MIE
- 专利权人: ASYST TECHNOLOGIES JAPAN, INC
- 当前专利权人: ASYST TECHNOLOGIES JAPAN, INC
- 当前专利权人地址: JP MIE
- 优先权: JP2006-345409 20061222
- 主分类号: G01F1/00
- IPC分类号: G01F1/00
摘要:
A stocker 1 includes a storage FOUP 20, plural purge units 50, a measurement FOUP 30 and a stacker crane 60. The storage FOUP 20 stores a semiconductor wafer inside. The measurement FOUP 30 includes a flow meter inside. The purge unit 50 includes a purge shelf 51 having plural purge tables 54 for placing the storage FOUP 20, and a nitrogen gas is supplied into the storage FOUP 20 placed on the purge table 54. The stacker crane 60 transports the storage container 20 onto the purge table 54, and the measurement FOUP 30 is transported between the plural purge tables 54.
公开/授权文献
- US07918122B2 Container transport system and measurement container 公开/授权日:2011-04-05
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