发明申请
US20080160204A1 Spontaneous copper seed deposition process for metal interconnects
审中-公开
金属互连的自发铜种子沉积工艺
- 专利标题: Spontaneous copper seed deposition process for metal interconnects
- 专利标题(中): 金属互连的自发铜种子沉积工艺
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申请号: US11648006申请日: 2006-12-28
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公开(公告)号: US20080160204A1公开(公告)日: 2008-07-03
- 发明人: Adrien R. Lavoie , James M. Blackwell , Darryl J. Morrison , Manish Sharma
- 申请人: Adrien R. Lavoie , James M. Blackwell , Darryl J. Morrison , Manish Sharma
- 主分类号: B05D1/18
- IPC分类号: B05D1/18 ; B05C3/00
摘要:
A method for depositing a copper seed layer onto a semiconductor substrate comprises applying a SCuD plating bath onto a surface of a substrate, rinsing the surface with an organic solvent, applying a co-reactant bath to the surface, and again rinsing the surface with an organic solvent. The SCuD plating bath is non-aqueous and comprises a copper precursor that is dissolved into an organic solvent. The co-reactant bath is also non-aqueous and comprises a co-reactant dissolved into an organic solvent. The SCuD plating bath may be heated before being applied to the substrate surface.
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