Invention Application
- Patent Title: Multiple Channel Interferometric Surface Contour Measurement System
- Patent Title (中): 多通道干涉表面轮廓测量系统
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Application No.: US11910638Application Date: 2006-04-04
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Publication No.: US20080165341A1Publication Date: 2008-07-10
- Inventor: Robert F. Dillon , Neil Judell , Yi Qian , Yuqing Zhu , D. Scott Ackerson , Gurpreet Singh
- Applicant: Robert F. Dillon , Neil Judell , Yi Qian , Yuqing Zhu , D. Scott Ackerson , Gurpreet Singh
- Applicant Address: US MA Wilmington
- Assignee: DIMENSIONAL PHOTONICS INTERNATIONAL, INC.
- Current Assignee: DIMENSIONAL PHOTONICS INTERNATIONAL, INC.
- Current Assignee Address: US MA Wilmington
- International Application: PCT/US06/12438 WO 20060404
- Main IPC: G01C11/12
- IPC: G01C11/12 ; G02B27/00 ; G02B7/00 ; G01N21/00

Abstract:
Described is a multiple channel interferometric surface contour measurement system. The measurement system includes a multiple channel interferometer projector, a digital camera and a processor. The projector includes two or more interferometer channels. Each channel has an optical axis spatially separate from the optical axes of the other channels. Each channel projects a fringe pattern onto the surface of an object to be measured. Image data for the fringe patterns projected on the object surface are acquired by the digital camera. The processor controls the projection of the fringe patterns of different spatial frequencies, adjusts the phase of each fringe pattern and generates surface contour data in response to the camera image data. The multiple channel interferometric surface contour measurement system provides numerous advantages over conventional single channel interferometric systems, including reduced sensitivity to optical noise, improved stability and increased measurement accuracy.
Public/Granted literature
- US07751063B2 Multiple channel interferometric surface contour measurement system Public/Granted day:2010-07-06
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