发明申请
US20080169885A1 PIEZOELECTRIC THIN-FILM RESONATOR, ACOUSTIC WAVE DEVICE AND METHOD FOR FABRICATING THE ACOUSTIC WAVE DEVICE
审中-公开
压电薄膜共振器，声波装置和用于制造声波装置的方法
- 专利标题： PIEZOELECTRIC THIN-FILM RESONATOR, ACOUSTIC WAVE DEVICE AND METHOD FOR FABRICATING THE ACOUSTIC WAVE DEVICE
- 专利标题（中）： 压电薄膜共振器，声波装置和用于制造声波装置的方法
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申请号： US11972316申请日： 2008-01-10
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公开(公告)号： US20080169885A1公开(公告)日： 2008-07-17
- 发明人: Masanori Ueda , Tokihiro Nishihara , Shinji Taniguchi , Tsuyoshi Yokoyama , Go Endo , Yasuyuki Saitou
- 申请人： Masanori Ueda , Tokihiro Nishihara , Shinji Taniguchi , Tsuyoshi Yokoyama , Go Endo , Yasuyuki Saitou
- 申请人地址： JP Yokohama-shi JP Kawasaki-shi
- 专利权人： FUJITSU MEDIA DEVICES LIMITED,FUJITSU LIMITED
- 当前专利权人： FUJITSU MEDIA DEVICES LIMITED,FUJITSU LIMITED
- 当前专利权人地址： JP Yokohama-shi JP Kawasaki-shi
- 优先权： JP2007-003357 20070111
- 主分类号： H01L41/22
- IPC分类号： H01L41/22 ; H03H9/00
摘要：
A piezoelectric thin-film resonator includes: a lower electrode provided on a substrate; a piezoelectric film provided on the lower electrode; an upper electrode provided on the piezoelectric film so as to face the lower electrode across the piezoelectric film to thus define a resonance portion; and a weight load film provided on the upper electrode, the weight load film being provided in the resonance portion and having an area smaller than that of the resonance portion.
公开/授权文献
- US1221273A Automatic vehicle-brake. 公开/授权日：1917-04-03
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