摘要:
A switch includes multiple torsion springs with each of one ends thereof secured to a substrate, a beam portion, to which each of the other ends of the multiple torsion springs is secured, and which is swung by an electrostatic actuator, and a switch contact portion in which a first contact provided at the beam portion and a second contact secured to the substrate are in connection or disconnection.
摘要:
A piezoelectric thin-film resonator includes a lower electrode formed on a substrate to define a rounded dome-shaped cavity between the lower electrode and the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. A membrane region is an overlapping region of the lower electrode and the upper electrode interposing the piezoelectric film and a projected area of the cavity onto the substrate includes the membrane region.
摘要:
An elastic boundary wave device includes a first medium with piezoelectricity, an electrode exciting an elastic wave and provided on the first medium, a second medium made of a different material from the first medium and provided on the first medium to cover the electrode, and a sound absorbing portion provided on the second medium.
摘要:
A duplexer includes a ladder filter and a multimode filter that are formed on the same surface of a predetermined substrate. In this duplexer, a first comb-like electrode of the ladder filter and a second comb-like electrode of the multimode filter have the same layer structure with the same film thickness. The first comb-like electrode and the second comb-like electrode are formed with single-layer films mainly containing aluminum. The relationship among the film thickness h of the first comb-like electrode and the second comb-like electrode, the center frequency f1 of the frequency band of the ladder filter, and the center frequency f2 of the frequency band of the multimode filter, is expressed as:300nullhnullf1null480300nullhnullf2null430.
摘要:
A filter includes multiple piezoelectric thin-film resonators each having a substrate, a lower electrode formed on the substrate, a piezoelectric film formed on the lower electrode, and an upper electrode provided on the piezoelectric film so that the upper electrode and the lower electrode face each other across the piezoelectric film. The multiple piezoelectric thin-film resonators include a first resonator in which at least a part of an outer curved portion of the piezoelectric film of the first resonator is located further out than an outer curved portion of a region in which the upper electrode and the lower electrode face each other across the piezoelectric film. The multiple piezoelectric thin-film resonators includes a second resonator in which at least a part of an outer curved portion of the piezoelectric film of the second resonator substantially coincides with an outer curved portion of a region in which the upper electrode and the lower electrode face each other across the piezoelectric film or is further in than the outer curved portion of the region.
摘要:
A surface acoustic wave element includes: metal patterns that include interdigital transducers, each of the metal patterns being formed with a first alloy or multi-layer film of metals having different standard electrode potentials; and metal films each formed with a second alloy or multi-layer film containing metals having different standard electrode potentials from the standard electrode potentials of the metals forming the first alloy or multi-layer film, the metal films being formed at least on a part of the regions other than the regions corresponding to the electrode fingers of the interdigital transducers of all the metal patterns that are electrically independent of one another.