发明申请
- 专利标题: NONVOLATILE SEMICONDUCTOR MEMORY DEVICE
- 专利标题(中): 非易失性半导体存储器件
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申请号: US12021003申请日: 2008-01-28
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公开(公告)号: US20080179659A1公开(公告)日: 2008-07-31
- 发明人: Toshiyuki Enda , Hiroyoshi Tanimoto , Takashi Izumida
- 申请人: Toshiyuki Enda , Hiroyoshi Tanimoto , Takashi Izumida
- 申请人地址: JP Tokyo
- 专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2007-017115 20070126
- 主分类号: H01L27/115
- IPC分类号: H01L27/115
摘要:
A nonvolatile semiconductor memory device relating to one embodiment of this invention includes a substrate, a plurality of memory strings formed on said substrate, said memory string having a first select gate transistor, a plurality of memory cells and a second select gate transistor, said first select gate transistor having a first pillar semiconductor, a first gate insulation layer formed around said first pillar semiconductor and a first gate electrode being formed around said first gate insulation layer; said memory cell having a second pillar semiconductor, a first insulation layer formed around said second pillar semiconductor, a storage layer formed around said first insulation layer, a second insulation layer formed around said storage layer and first to nth electrodes (n is a natural number 2 or more) being formed around said second insulation layer, said first to nth electrodes being spread in two dimensions respectively, said second select gate transistor having a third pillar semiconductor, a second gate insulation layer formed around said third pillar semiconductor and a second gate electrode being formed around said second gate insulation layer, and a channel region of at least either said first select gate transistor or said second select gate transistor formed by an opposite conductive type semiconductor to a source region and a drain region.
公开/授权文献
- US07956408B2 Nonvolatile semiconductor memory device 公开/授权日:2011-06-07
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