发明申请
- 专利标题： CALIBRATION OF HIGH SPEED LOADER TO SUBSTRATE TRANSPORT SYSTEM
- 专利标题（中）： 高速装载机校准运输系统
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申请号： US12099780申请日： 2008-04-08
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公开(公告)号： US20080187419A1公开(公告)日： 2008-08-07
- 发明人: Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
- 申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 主分类号： H01L21/67
- IPC分类号： H01L21/67
摘要：
In a first aspect, a first method of calibrating a substrate carrier loader to a moving conveyor is provided. The first method includes the steps of (1) providing a substrate carrier loader adapted to load substrate carriers onto a moving conveyor; (2) aligning the substrate carrier loader to the moving conveyor; and (3) calibrating the substrate carrier loader to the moving conveyor. Numerous other aspects are provided.
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