发明申请
- 专利标题: Method For Reducing And Homogenizing The Thickness Of A Semiconductor Layer Which Lies On The Surface Of An Electrically Insulating Material
- 专利标题(中): 降低和均匀化绝缘材料表面的半导体层厚度的方法
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申请号: US12023223申请日: 2008-01-31
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公开(公告)号: US20080188084A1公开(公告)日: 2008-08-07
- 发明人: Diego Feijoo , Oliver Riemenschneider , Reinhold Wahlich
- 申请人: Diego Feijoo , Oliver Riemenschneider , Reinhold Wahlich
- 申请人地址: DE Munich
- 专利权人: SILTRONIC AG
- 当前专利权人: SILTRONIC AG
- 当前专利权人地址: DE Munich
- 优先权: DE102007006151.1 20070207
- 主分类号: H01L21/302
- IPC分类号: H01L21/302
摘要:
To reduce and homogenize the thickness of a semiconductor layer which lies on the surface of an electrically insulating material, the surface of the semiconductor layer is exposed to the action of an etchant whose redox potential is adjusted as a function of the material and the desired final thickness of the semiconductor layer, so that the material erosion per unit time on the surface of the semiconductor layer due to the etchant becomes less as the thickness of the semiconductor layer decreases, and is only from 0 to 10% of the thickness per second when the desired thickness is reached. The method is carried out without the action of light or the application of an external electrical voltage.
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