发明申请
- 专利标题: SYSTEM AND METHOD FOR TREATING WASTEWATER
- 专利标题(中): 用于处理废水的系统和方法
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申请号: US11833234申请日: 2007-08-03
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公开(公告)号: US20080190867A1公开(公告)日: 2008-08-14
- 发明人: Sin Chai Lin , Yuan Hsin Peng , Jiang Liu , Jun Feng
- 申请人: Sin Chai Lin , Yuan Hsin Peng , Jiang Liu , Jun Feng
- 申请人地址: CN Shanghai
- 专利权人: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (Shanghai) CORPORATION
- 当前专利权人: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (Shanghai) CORPORATION
- 当前专利权人地址: CN Shanghai
- 优先权: CN200710037681.9 20070213
- 主分类号: B01D37/00
- IPC分类号: B01D37/00 ; B01D43/00
摘要:
The present invention provides a system for treating wastewater produced during grinding and slicing in a semiconductor packaging process, comprising a collecting tank for collecting the wastewater produced during grinding and/or slicing in a semiconductor packaging process; a physical filtration device for separating the suspended materials from the wastewater by physical filtration, the physical filtration device being in fluid communication with the collecting tank; a receiving device for receiving the wastewater treated by the physical filtration device, and the receiving device being in fluid communication with the physical filtration device. The present invention further provides a method for treating wastewater produce during grinding and slicing in a semiconductor packaging process. The present invention simplifies the treatment of wastewater produced during grinding and slicing in a semiconductor packaging process, and lowers the cost.
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