发明申请
US20080191264A1 Non-volatile memory devices and methods of operating and fabricating the same
审中-公开
非易失性存储器件及其操作和制造方法
- 专利标题: Non-volatile memory devices and methods of operating and fabricating the same
- 专利标题(中): 非易失性存储器件及其操作和制造方法
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申请号: US12010139申请日: 2008-01-22
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公开(公告)号: US20080191264A1公开(公告)日: 2008-08-14
- 发明人: Won-Joo Kim , Yoon-dong Park , June-mo Koo , Suk-pil Kim , Tae-hee Lee
- 申请人: Won-Joo Kim , Yoon-dong Park , June-mo Koo , Suk-pil Kim , Tae-hee Lee
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 优先权: KR10-2007-0007642 20070124
- 主分类号: H01L29/00
- IPC分类号: H01L29/00 ; H01L21/3205
摘要:
Non-volatile memory devices highly integrated using an oxide based compound semiconductor and methods of operating and fabricating the same are provided. A non-volatile memory device may include one or more oxide based compound semiconductor layers. A plurality of auxiliary gate electrodes may be arranged to be insulated from the one or more oxide based compound semiconductor layers. A plurality of control gate electrodes may be positioned between adjacent pairs of the plurality of auxiliary gate electrodes at a different level from the plurality of auxiliary gate electrodes. The plurality of control gate electrodes may be insulated from the one or more oxide based compound semiconductor layers. A plurality of charge storing layers may be interposed between the one or more oxide based compound semiconductor layers and the plurality of control gate electrodes.
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