Invention Application
US20080193359A1 Methods of forming single-crystal metal-silicide nanowires and resulting nanowire structures
失效
形成单晶金属硅化物纳米线和所得纳米线结构的方法
- Patent Title: Methods of forming single-crystal metal-silicide nanowires and resulting nanowire structures
- Patent Title (中): 形成单晶金属硅化物纳米线和所得纳米线结构的方法
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Application No.: US11707601Application Date: 2007-02-13
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Publication No.: US20080193359A1Publication Date: 2008-08-14
- Inventor: Zhaoning Yu , Zhiyong Li , Wei Wu , Shih-Yuan Wang , R. Stanley Williams
- Applicant: Zhaoning Yu , Zhiyong Li , Wei Wu , Shih-Yuan Wang , R. Stanley Williams
- Main IPC: C01B21/068
- IPC: C01B21/068

Abstract:
Various embodiments of the present invention are directed to methods of forming single-crystal metal-silicide nanowires and resulting nanowire structures. In one embodiment of the present invention, a method of fabricating nanowires is disclosed. In the method, a number of nanowire-precursor members are formed. Each of the nanowire-precursor members includes a substantially single-crystal silicon region and a polycrystalline- metallic region. The substantially single-crystal silicon region and the polycrystalline-metallic region of each of the nanowire-precursor members is reacted to form corresponding substantially single-crystal metal-silicide nanowires. In another embodiment of the present invention, a nanowire structure is disclosed. The nanowire structure includes a substrate having an electrically insulating layer. A number of substantially single-crystal metal-silicide nanowires are positioned on the electrically insulating layer.
Public/Granted literature
- US07829050B2 Methods of forming single-crystal metal-silicide nanowires and resulting nanowire structures Public/Granted day:2010-11-09
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