发明申请
US20080194079A1 Method For Forming Median Crack In Substrate And Apparatus For Forming Median Crack In Substrate
有权
在基材中形成中间裂纹的方法和在基材中形成中间裂纹的装置
- 专利标题: Method For Forming Median Crack In Substrate And Apparatus For Forming Median Crack In Substrate
- 专利标题(中): 在基材中形成中间裂纹的方法和在基材中形成中间裂纹的装置
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申请号: US11572931申请日: 2005-07-29
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公开(公告)号: US20080194079A1公开(公告)日: 2008-08-14
- 发明人: Koji Yamamoto , Noboru Hasaka
- 申请人: Koji Yamamoto , Noboru Hasaka
- 优先权: JP2004-247570 20040730
- 国际申请: PCT/JP2005/013980 WO 20050729
- 主分类号: H01L21/301
- IPC分类号: H01L21/301 ; B23K26/08
摘要:
A method for forming a median crack and an apparatus for forming a median crack are provided, where the formation of a deep, straight median crack is possible, and an excellent broken surface of a brittle substrate can be gained as a result of breaking.In the method for forming a median crack in a brittle substrate, the brittle substrate is irradiated with a laser beam along a laser-scribe line to be formed with median cracks on the brittle substrate so as to be heated to a temperature that is no higher than its melting temperature, and thereby, a median crack is created along the laser-scribe line to be formed with median cracks and expanded starting from a notch that has been formed in the brittle substrate, and this method for forming a median crack in a brittle substrate is characterized in that high temperature portions that receive intense radiation from a laser beam, and low temperature portions that receive faint radiation from a laser beam are alternately formed along the laser-scribe line to be formed with median cracks.
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