公开(公告)号：US20080135532A1

公开(公告)日：2008-06-12

申请号：US11587957

申请日：2005-04-27

申请人： Noboru Hasaka ,  Toru Kumagai ,  Koji Yamamoto

发明人： Noboru Hasaka ,  Toru Kumagai ,  Koji Yamamoto

IPC分类号： B23K26/14 ,  B23K26/02

CPC分类号： B23K26/0676 ,  B23K26/0604 ,  B23K26/0736 ,  B23K26/40 ,  B23K26/703 ,  B23K2103/50 ,  B23K2103/52 ,  B28D1/221 ,  C03B33/0207 ,  C03B33/093

摘要： The forming of a heated spot (10) by using a laser beam irradiated to a brittle substrate along a predetermined scribing line (S) and the ejecting of a cooling medium, after interruption of irradiation of laser beam, to impinge on the spot to thereby form a cooled spot (20) constitute a unit operation to be repeated. The cooled spot overlapping the heated spot (10) that has a longitudinal center line (b) crossing the scribing line (S) at a right angle serves to restore thermal equilibrium in and around the spots while forming unit cracks (n) continued one from another to form a linear crack (E,U) perpendicular to the brittle substrate surface.

摘要翻译： 通过使用沿着预定划线（S）照射到脆性基板的激光束并且在中断激光束照射之后喷射冷却介质来形成加热点（10）以冲击到该位置 形成冷却点（20）构成要重复的单元操作。 与直角交叉划线（S）的纵向中心线（b）的加热点（10）重叠的冷却点用于恢复斑点中和周围的热平衡，同时形成单元裂纹（n） 另一个形成垂直于脆性基底表面的线性裂纹（E，U）。

公开(公告)号：US07723212B2

公开(公告)日：2010-05-25

申请号：US11572931

申请日：2005-07-29

申请人： Koji Yamamoto ,  Noboru Hasaka

发明人： Koji Yamamoto ,  Noboru Hasaka

IPC分类号： H01L21/00

CPC分类号： C03B33/093 ,  B23K26/40 ,  B23K2103/50 ,  B28D1/221 ,  B28D5/0011

摘要： A method for forming a median crack and an apparatus for forming a median crack are provided, where the formation of a deep, straight median crack is possible, and an excellent broken surface of a brittle substrate can be gained as a result of breaking. In the method for forming a median crack in a brittle substrate, the brittle substrate is irradiated with a laser beam along a laser-scribe line to be formed with median cracks on the brittle substrate so as to be heated to a temperature that is no higher than its melting temperature, and thereby, a median crack is created along the laser-scribe line to be formed with median cracks and expanded starting from a notch that has been formed in the brittle substrate, and this method for forming a median crack in a brittle substrate is characterized in that high temperature portions that receive intense radiation from a laser beam, and low temperature portions that receive faint radiation from a laser beam are alternately formed along the laser-scribe line to be formed with median cracks.

摘要翻译： 提供了形成中间裂纹的方法和形成中间裂纹的装置，其中可以形成深的直的中间裂纹，并且作为断裂的结果可以获得脆性基底的优异的破裂表面。 在脆性基板中形成中值裂纹的方法中，沿着激光划线对激光束照射脆性基板，在脆性基板上形成中等裂纹，加热至不高于 比其熔融温度高，从而沿着激光划线产生中间裂缝，以形成中间裂纹，并从形成在脆性基板中的切口开始膨胀，并且该方法用于形成中间裂纹 脆性基板的特征在于，接收来自激光束的强烈辐射的高温部分和从激光束接收微弱辐射的低温部分沿着激光划线交替地形成以形成中间裂纹。

公开(公告)号：US20080194079A1

公开(公告)日：2008-08-14

申请号：US11572931

申请日：2005-07-29

申请人： Koji Yamamoto ,  Noboru Hasaka

发明人： Koji Yamamoto ,  Noboru Hasaka

IPC分类号： H01L21/301 ,  B23K26/08

CPC分类号： C03B33/093 ,  B23K26/40 ,  B23K2103/50 ,  B28D1/221 ,  B28D5/0011

摘要： A method for forming a median crack and an apparatus for forming a median crack are provided, where the formation of a deep, straight median crack is possible, and an excellent broken surface of a brittle substrate can be gained as a result of breaking.In the method for forming a median crack in a brittle substrate, the brittle substrate is irradiated with a laser beam along a laser-scribe line to be formed with median cracks on the brittle substrate so as to be heated to a temperature that is no higher than its melting temperature, and thereby, a median crack is created along the laser-scribe line to be formed with median cracks and expanded starting from a notch that has been formed in the brittle substrate, and this method for forming a median crack in a brittle substrate is characterized in that high temperature portions that receive intense radiation from a laser beam, and low temperature portions that receive faint radiation from a laser beam are alternately formed along the laser-scribe line to be formed with median cracks.

摘要翻译： 提供了形成中间裂纹的方法和形成中间裂纹的装置，其中可以形成深的直的中间裂纹，并且作为断裂的结果可以获得脆性基底的优异的破裂表面。 在脆性基板中形成中值裂纹的方法中，沿着激光划线对激光束照射脆性基板，在脆性基板上形成中等裂纹，加热至不高于 比其熔融温度高，从而沿着激光划线产生中间裂缝，以形成中间裂纹，并从形成在脆性基板中的切口开始膨胀，并且该方法用于形成中间裂纹 脆性基板的特征在于，接收来自激光束的强烈辐射的高温部分和从激光束接收微弱辐射的低温部分沿着激光划线交替地形成以形成中间裂纹。