发明申请
US20080198891A1 Excimer laser device operable at high repetition rate and having high band-narrowing efficiency
有权
准分子激光装置可以高重复率操作并且具有高带窄效率
- 专利标题: Excimer laser device operable at high repetition rate and having high band-narrowing efficiency
- 专利标题(中): 准分子激光装置可以高重复率操作并且具有高带窄效率
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申请号: US12071048申请日: 2008-02-14
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公开(公告)号: US20080198891A1公开(公告)日: 2008-08-21
- 发明人: Tsukasa Hori , Takanobu Ishihara , Kouji Kakizaki
- 申请人: Tsukasa Hori , Takanobu Ishihara , Kouji Kakizaki
- 优先权: JP2007-034777 20070215
- 主分类号: H01S3/03
- IPC分类号: H01S3/03
摘要:
A narrow-band discharge excited laser device including a laser chamber having a laser gas sealed therein, a pair of electrodes provided within the laser chamber to face each other with a predetermined distance therebetween, a band-narrowing module having a magnifying prism and a grating and receiving laser light passing through a slit, and a cross-flow fan circulating the laser gas passing between the electrodes, in which a pulsed voltage is applied from a high-voltage power supply to the pair of electrodes to generate electric discharge between the electrodes, and the pair of electrodes have a width of 1 to 2 mm, a ratio between the electrode width and the inter-electrode distance (electrode with inter-electrode distance) being 0.25 to 0.125.
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