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    Excimer laser device operable at high repetition rate and having high band-narrowing efficiency
    1.
    发明申请
    Excimer laser device operable at high repetition rate and having high band-narrowing efficiency 有权
    准分子激光装置可以高重复率操作并且具有高带窄效率

    公开(公告)号：US20080198891A1

    公开(公告)日：2008-08-21

    申请号：US12071048

    申请日：2008-02-14

    申请人： Tsukasa Hori ,  Takanobu Ishihara ,  Kouji Kakizaki

    发明人： Tsukasa Hori ,  Takanobu Ishihara ,  Kouji Kakizaki

    IPC分类号： H01S3/03

    CPC分类号： H01S3/225 ,  H01S3/0057 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/073 ,  H01S3/08036 ,  H01S3/0805 ,  H01S3/2251 ,  H01S3/2316 ,  H01S3/2325

    摘要： A narrow-band discharge excited laser device including a laser chamber having a laser gas sealed therein, a pair of electrodes provided within the laser chamber to face each other with a predetermined distance therebetween, a band-narrowing module having a magnifying prism and a grating and receiving laser light passing through a slit, and a cross-flow fan circulating the laser gas passing between the electrodes, in which a pulsed voltage is applied from a high-voltage power supply to the pair of electrodes to generate electric discharge between the electrodes, and the pair of electrodes have a width of 1 to 2 mm, a ratio between the electrode width and the inter-electrode distance (electrode with inter-electrode distance) being 0.25 to 0.125.

    摘要翻译： 一种窄带放电激发激光装置，包括：激光腔，其内部密封有激光气体;一对电极，设置在激光腔内，以相互间隔预定距离彼此面对;具有放大棱镜和光栅的带窄模块 并且接收通过狭缝的激光，并且横流风扇循环通过电极之间的激光气体，其中从高压电源向该对电极施加脉冲电压，以在电极之间产生放电 ，一对电极的宽度为1〜2mm，电极宽度与电极间距离（电极间距离的电极）的比例为0.25〜0.125。

    Excimer laser device operable at high repetition rate and having high band-narrowing efficiency
    3.
    发明授权
    Excimer laser device operable at high repetition rate and having high band-narrowing efficiency 有权
    准分子激光装置可以高重复率操作并且具有高带窄效率

    公开(公告)号：US07782922B2

    公开(公告)日：2010-08-24

    申请号：US12071048

    申请日：2008-02-14

    申请人： Tsukasa Hori ,  Takanobu Ishihara ,  Kouji Kakizaki

    发明人： Tsukasa Hori ,  Takanobu Ishihara ,  Kouji Kakizaki

    IPC分类号： H01S3/22 ,  H01S3/223 ,  H01S3/03

    CPC分类号： H01S3/225 ,  H01S3/0057 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/073 ,  H01S3/08036 ,  H01S3/0805 ,  H01S3/2251 ,  H01S3/2316 ,  H01S3/2325

    摘要： A narrow-band discharge excited laser device including a laser chamber having a laser gas sealed therein, a pair of electrodes provided within the laser chamber to face each other with a predetermined distance therebetween, a band-narrowing module having a magnifying prism and a grating and receiving laser light passing through a slit, and a cross-flow fan circulating the laser gas passing between the electrodes, in which a pulsed voltage is applied from a high-voltage power supply to the pair of electrodes to generate electric discharge between the electrodes, and the pair of electrodes have a width of 1 to 2 mm, a ratio between the electrode width and the inter-electrode distance (electrode with inter-electrode distance) being 0.25 to 0.125.

    摘要翻译： 一种窄带放电激发激光装置，包括：激光腔，其内部密封有激光气体;一对电极，设置在激光腔内，以相互间隔预定距离彼此面对;具有放大棱镜和光栅的带窄模块 并且接收通过狭缝的激光，并且横流风扇循环通过电极之间的激光气体，其中从高压电源向该对电极施加脉冲电压，以在电极之间产生放电 ，一对电极的宽度为1〜2mm，电极宽度与电极间距离（电极间距离的电极）的比例为0.25〜0.125。

    SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
    6.
    发明申请
    SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT 审中-公开
    用于产生极光紫外线灯的系统和方法

    公开(公告)号：US20140077099A1

    公开(公告)日：2014-03-20

    申请号：US14114906

    申请日：2012-06-07

    申请人： Tsukasa Hori ,  Kouji Kakizaki ,  Tatsuya Yanagida ,  Osamu Wakabayashi

    发明人： Tsukasa Hori ,  Kouji Kakizaki ,  Tatsuya Yanagida ,  Osamu Wakabayashi

    IPC分类号： F21K2/00

    CPC分类号： H05G2/008 ,  F21K2/00

    摘要： A system includes a chamber, a laser beam apparatus configured to generate a laser beam to be introduced into the chamber, a laser controller for the laser beam apparatus to control at least a beam intensity and an output timing of the laser beam, and a target supply unit configured to supply a target material into the chamber, the target material being irradiated with the laser beam for generating extreme ultraviolet light.

    摘要翻译： 一种系统，包括：室，激光束装置，被配置为产生要被引入到所述腔室中的激光束;激光控制器，用于激光束装置至少控制激光束的光束强度和输出定时;以及目标 供给单元，被配置为将目标材料供应到所述室中，所述目标材料被所述激光束照射以产生极紫外光。

    Discharge electrode for laser device
    8.
    发明授权
    Discharge electrode for laser device 有权
    激光器放电电极

    公开(公告)号：US06628693B1

    公开(公告)日：2003-09-30

    申请号：US09663940

    申请日：2000-09-18

    申请人： Takanobu Ishihara ,  Hirotoshi Inoue ,  Tsukasa Hori

    发明人： Takanobu Ishihara ,  Hirotoshi Inoue ,  Tsukasa Hori

    IPC分类号： H01S3097

    CPC分类号： H01S3/038 ,  H01S3/0385 ,  H01S3/225

    摘要： A discharge electrode for a laser device which can cause stable main discharge to occur is provided. To this end, the discharge electrode includes a cathode base (8) made of an insulating material for sealing up a chamber opening (7) provided in a laser chamber (2) for containing laser gases, a cathode (5) attached to the cathode base (8) with a bottom surface (5A) of the cathode (5) in contact therewith, and a plurality of high-voltage feeder rods (12) disposed in a longitudinal direction, penetrating through the cathode base (8) from an outside of the laser chamber (2) which supplies a high-voltage current to the cathode (5), in which an O-ring groove (22) for sealing in the laser gases is formed on the bottom surface of the cathode (5) to surround a plurality of holes (24) for fixing the high-voltage feeder rods (12) disposed on the bottom surface of the cathode (5).

    摘要翻译： 提供一种用于能够引起稳定的主放电的激光装置的放电电极。 为此，放电电极包括由绝缘材料制成的用于密封设置在用于容纳激光气体的激光室（2）中的室开口（7）的阴极基体（8），附着到阴极的阴极（5） 基底（8）与阴极（5）的底面（5A）接触，以及沿纵向方向设置的多个高压馈电棒（12），从外部穿透阴极基座（8） 向阴极（5）供给高压电流的激光室（2），其中在阴极（5）的底面上形成用于密封激光气体的O形环槽（22）至 围绕多个用于固定设置在阴极（5）的底表面上的高压馈电棒（12）的孔（24）。

    Gas laser apparatus
    9.
    发明授权
    Gas laser apparatus 有权
    气体激光设备

    公开(公告)号：US06507596B1

    公开(公告)日：2003-01-14

    申请号：US09657666

    申请日：2000-09-08

    申请人： Tsukasa Hori ,  Takanobu Ishihara ,  Hirotoshi Inoue ,  Takashi Matsunaga

    发明人： Tsukasa Hori ,  Takanobu Ishihara ,  Hirotoshi Inoue ,  Takashi Matsunaga

    IPC分类号： H01S3097

    CPC分类号： H01S3/038 ,  H01S3/0384 ,  H01S3/09713 ,  H01S3/0977

    摘要： The amount of pre-ionization by the pre-ionization electrode provided on the gas outflow side of the main discharge space, out of at least one pair of pre-ionization electrodes, is adjusted so as to attain the desired beam profile. As a result, the pre-ionization intensity of the laser gas remaining on the gas outflow side of the main discharge space is made lower than the pre-ionization intensity of the laser gas flowing into the main discharge space. In other words, the intensity of the laser light on the gas outflow side of the main discharge space is made weaker than the intensity of the laser light in the center of the main discharge space. Accordingly, the location of the maximum light intensity of the beam profile does not deviate from the center of the discharge width. Also, since the pre-ionization electrodes are provided on both the gas inflow side and the gas outflow side of the main discharge space, the pre-ionization intensity of the laser gas on the gas inflow side of the main discharge space is never stronger than the pre-ionization intensity of the laser gas present at the center of the main discharge space.

    摘要翻译： 通过设置在主放电空间的气体流出侧上的至少一对预电离电极中的预电离电极的预电离量被调节以获得期望的光束轮廓。 结果，使残留在主放电空间的气体流出侧的激光气体的电离前强度低于流入主放电空间的激光气体的电离前强度。 换句话说，使主放电空间的气体流出侧上的激光的强度比主放电空间的中心处的激光强度弱。 因此，光束轮廓的最大光强度的位置不偏离放电宽度的中心。 此外，由于在主放电空间的气体流入侧和气体流出侧均设置有预电离电极，所以主放电空间的气体流入侧的激光气体的前电离强度永不比 存在于主放电空间中心的激光气体的电离前强度。

    Gas laser electrode, laser chamber employing the electrode, and gas laser device
    10.
    发明授权
    Gas laser electrode, laser chamber employing the electrode, and gas laser device 有权
    气体激光电极，采用电极的激光室和气体激光装置

    公开(公告)号：US07006546B2

    公开(公告)日：2006-02-28

    申请号：US09795401

    申请日：2001-03-01

    申请人： Tsukasa Hori ,  Junichi Fujimoto ,  Takayuki Yabu

    发明人： Tsukasa Hori ,  Junichi Fujimoto ,  Takayuki Yabu

    IPC分类号： H01S3/22

    CPC分类号： H01S3/038 ,  H01S3/225

    摘要： Provided is a gas laser electrode in which a stable laser output can be obtained by inhibiting the deterioration of the electrode (discharge characteristics). In an anode 3, a dielectric material 4 is applied on the surface of a discharging portion 3a in order to inhibit the deterioration of the electrode. Used as a dielectric material 4 may be, for example, fluorides such as calcium fluoride and strontium fluoride. Further, the dielectric material 4 is of a thickness (in a range of 0.005 mm˜1.5 mm, preferably 0.1 mm˜1 mm, for example) sufficient to prevent the erosion of halogen gas in the discharging portion 3a of the anode 3 and to secure a conductivity thereof, whereby it is enabled to form mono-fluoride evenly in extreme precision.

    摘要翻译： 提供一种气体激光电极，其中通过抑制电极的劣化（放电特性）可以获得稳定的激光输出。 在阳极3中，为了抑制电极的劣化，在放电部分3a的表面上施加电介质材料4。 用作电介质材料4可以是例如氟化物如氟化钙和氟化锶。 此外，电介质材料4的厚度（例如在0.005mm〜1.5mm的范围内，优选为0.1mm〜1mm），足以防止阳极3的放电部分3a中的卤素气体的侵蚀，以及 以确保其导电性，从而能够以极高的精度均匀地形成单氟化物。