发明申请
- 专利标题: Method for Determining Intensity Distribution in the Image Plane of a Projection Exposure Arrangement
- 专利标题(中): 确定投影曝光安排图像平面中强度分布的方法
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申请号: US12065451申请日: 2006-09-02
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公开(公告)号: US20080212060A1公开(公告)日: 2008-09-04
- 发明人: Joern Greif-Wuestenbecker , Beate Boehme , Ulrich Stroessner , Michael Totzeck , Vladimir Kamenov , Olaf Dittmann , Daniel Kraehmer , Toralf Gruner , Bernd Geh
- 申请人: Joern Greif-Wuestenbecker , Beate Boehme , Ulrich Stroessner , Michael Totzeck , Vladimir Kamenov , Olaf Dittmann , Daniel Kraehmer , Toralf Gruner , Bernd Geh
- 申请人地址: DE Jena
- 专利权人: CARL ZEISS SMS GMBH
- 当前专利权人: CARL ZEISS SMS GMBH
- 当前专利权人地址: DE Jena
- 优先权: DE102005042496.1 20050905
- 国际申请: PCT/EP06/08581 WO 20060902
- 主分类号: G03B27/54
- IPC分类号: G03B27/54
摘要:
A method for determining intensity distribution in the focal plane of a projection exposure arrangement, in which a large aperture imaging system is emulated and a light from a sample is represented on a local resolution detector by an emulation imaging system. A device for carrying out the method and emulated devices are also described. The invention makes it possible to improve a reproduction quality since the system apodisation is taken into consideration. The inventive method consists in includes determining the integrated amplitude distribution in an output pupil, combining the integrated amplitude distribution with a predetermined apodization correction and calculating a corrected apodization image according to the modified amplitude distribution.
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