发明申请
US20080220243A1 Composition, sintered product of silicon nitride, article of manufacture, and cutting method 有权
组成,氮化硅烧结产品,制造和切割方法

Composition, sintered product of silicon nitride, article of manufacture, and cutting method
摘要:
A sintered product of silicon nitride includes a crystal phase mainly having silicon nitride crystal grains and an amorphous grain-boundary phase located on the grain boundaries of the silicon nitride crystal grains. The grain-boundary phase contains lanthanum, aluminum, magnesium, silicon, and oxygen. The sintered product described above contains 0.1% by mass or more of lanthanum on an oxide basis, 0.05 to 0.6% by mass of aluminum on an oxide basis, 0.3% by mass or more of magnesium on an oxide basis, and 2.5% by mass or less of oxygen. The total amount of lanthanum on an oxide basis, aluminum on an oxide basis, and magnesium on an oxide basis is 3.5% by mass or less.
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