发明申请
- 专利标题: Method for producing a semiconductor crystal
- 专利标题(中): 半导体晶体的制造方法
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申请号: US12073178申请日: 2008-02-29
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公开(公告)号: US20080223286A1公开(公告)日: 2008-09-18
- 发明人: Seiji Nagai , Shiro Yamazaki , Takayuki Sato , Katsuhiro Imai , Makoto Iwai , Takatomo Sasaki , Yusuke Mori , Fumio Kawamura
- 申请人: Seiji Nagai , Shiro Yamazaki , Takayuki Sato , Katsuhiro Imai , Makoto Iwai , Takatomo Sasaki , Yusuke Mori , Fumio Kawamura
- 申请人地址: JP Aichi-ken JP Nagoya-shi JP Suita-shi
- 专利权人: TOYODA GOSEI CO., LTD.,NGK INSULATORS, LTD.,,OSAKA UNIVERSIITY
- 当前专利权人: TOYODA GOSEI CO., LTD.,NGK INSULATORS, LTD.,,OSAKA UNIVERSIITY
- 当前专利权人地址: JP Aichi-ken JP Nagoya-shi JP Suita-shi
- 优先权: JP2007-053321 20070302
- 主分类号: C30B23/00
- IPC分类号: C30B23/00
摘要:
Objects of the invention are to further enhance crystallinity and crystallinity uniformity of a semiconductor crystal produced through the flux method, and to effectively enhance the production yield of the semiconductor crystal. The c-axis of a seed crystal including a GaN single-crystal layer is aligned in a horizontal direction (y-axis direction), one a-axis of the seed crystal is aligned in the vertical direction, and one m-axis is aligned in the x-axis direction. Thus, three contact points at which a supporting tool contacts the seed crystal are present on m-plane. The supporting tool has two supporting members, which extend in the vertical direction. One supporting member has an end part, which is inclined at 30° with respect to the horizontal plane α. The reasons for supporting a seed crystal at m-plane thereof are that m-plane exhibits a crystal growth rate, which is lower than that of a-plane, and that desired crystal growth on c-plane is not inhibited. Actually, a plurality of seed crystals and supporting tools are periodically placed along the y-axis direction.
公开/授权文献
- US08216365B2 Method for producing a semiconductor crystal 公开/授权日:2012-07-10
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