发明申请
US20080224093A1 ETCHANT FOR SIGNAL WIRE AND METHOD OF MANUFACTURING THIN FILM TRANSISTOR ARRAY PANEL USING ETCHANT
审中-公开
信号线检测器和使用电容器制造薄膜晶体管阵列面板的方法
- 专利标题： ETCHANT FOR SIGNAL WIRE AND METHOD OF MANUFACTURING THIN FILM TRANSISTOR ARRAY PANEL USING ETCHANT
- 专利标题（中）： 信号线检测器和使用电容器制造薄膜晶体管阵列面板的方法
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申请号： US12106023申请日： 2008-04-18
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公开(公告)号： US20080224093A1公开(公告)日： 2008-09-18
- 发明人: Hong-Sick Park , Hong-Je Cho , Sung-Chul Kang , Pong-Ok Park , An-Na Park
- 申请人： Hong-Sick Park , Hong-Je Cho , Sung-Chul Kang , Pong-Ok Park , An-Na Park
- 优先权： KR2003-0034007 20030528
- 主分类号： C09K13/06
- IPC分类号： C09K13/06
摘要：
Gate lines including a lower Al—Nd layer and an upper MoW layer, data lines including a MoW layer, and pixel electrodes including an IZO layer are patterned using a single etchant. The etchant contains a phosphoric acid of about 50-60%, a nitric acid of about 6-10%, an acetic acid of about 15-25%, a stabilizer of about 2-5% stabilizer, and deionized water. The stabilizer includes oxy-hydride inorganic acid represented by M(OH)xLy, where M includes at least one of Zn, Sn, Cr, Al, Ba, Fe, Ti, Si and B, L includes at least one of H2O, NH3, CN and NH2R (where R is alkyl group), X is 2 or 3, and Y is 0, 1, 2 or 3.
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