发明申请
- 专利标题： Method and apparatus for stabilizing and tuning the bandwidth of laser light
- 专利标题（中）： 稳定和调谐激光带宽的方法和装置
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申请号： US12082253申请日： 2008-04-09
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公开(公告)号： US20080232408A1公开(公告)日： 2008-09-25
- 发明人: Kevin M. O'Brien , Robert N. Jacques
- 申请人： Kevin M. O'Brien , Robert N. Jacques
- 申请人地址： US CA San Diego
- 专利权人： CYMER, INC.
- 当前专利权人： CYMER, INC.
- 当前专利权人地址： US CA San Diego
- 主分类号： H01S3/102
- IPC分类号： H01S3/102 ; H01S3/098
摘要：
According to aspects of an embodiment of the disclosed subject matter, method and apparatus are disclose that ma y comprise adjusting a differential timing between gas discharges in the seed laser and amplifier laser for bandwidth control, based on the error signal, or for control of another laser operating parameter other than bandwidth, without utilizing any beam magnification control, or adjusting a differential timing between gas discharges in the seed laser and amplifier laser for bandwidth control, based on the error signal, or for control of another laser operating parameter other than bandwidth, while utilizing beam magnification control for other than bandwidth control, and adjusting a differential timing between gas discharges in the seed laser and amplifier laser for bandwidth control, based on the error signal, or for control of another laser operating parameter other than bandwidth, while utilizing beam magnification control for bandwidth control based on the error signal.