Laser gas injection system
    1.
    发明申请
    Laser gas injection system 有权
    激光喷射系统

    公开(公告)号:US20080205472A1

    公开(公告)日:2008-08-28

    申请号:US11796065

    申请日:2007-04-25

    IPC分类号: H01S3/22

    摘要: A method and apparatus are disclosed which may comprise predicting the gas lifetime for a gas discharge laser light source for a photolithography process, the light source comprising a halogen containing lasing gas may comprise: utilizing at least one of a plurality of laser operating input and/or output parameters; utilizing a set of at least one parameter of utilization in the photolithography process to determine a gas use model in relation to the respective input or output parameter; predicting the end of gas life based upon the model and a measurement of the respective input or output parameter. The parameter may comprise a pulse utilization pattern. The method and apparatus may comprise performing gas management for a gas discharge laser light source for a photolithography process, the light source comprising a halogen containing lasing gas comprising: utilizing periodic and frequent partial gas refills comprising an inject comprising a mixture of halogen gas and bulk gas in generally the same ration as the premix ratio provided to the laser in a full gas refill, and in an amount less than two percent of the total gas pressure prior to the injection.

    摘要翻译: 公开了一种方法和装置,其可以包括预测用于光刻工艺的气体放电激光光源的气体寿命,包括含卤素的激光气体的光源可以包括:利用多个激光操作输入和/ 或输出参数; 在光刻工艺中利用一组至少一个利用参数来确定相对于相应输入或输出参数的气体使用模型; 基于模型和相应的输入或输出参数的测量来预测气体寿命的结束。 该参数可以包括脉冲利用模式。 该方法和装置可以包括对用于光刻工艺的气体放电激光光源执行气体管理,该光源包括含卤素的激光气体,其包括:利用周期性和频繁的部分气体再填充,其包括含有卤素气体和体积的混合物 气体通常与在全气体再填充中提供给激光器的预混合比率相同,并且其量小于喷射前的总气体压力的2%。

    Method and apparatus for stabilizing and tuning the bandwidth of laser light
    2.
    发明授权
    Method and apparatus for stabilizing and tuning the bandwidth of laser light 有权
    稳定和调谐激光带宽的方法和装置

    公开(公告)号:US07822084B2

    公开(公告)日:2010-10-26

    申请号:US12082253

    申请日:2008-04-09

    摘要: According to aspects of an embodiment of the disclosed subject matter, method and apparatus are disclose that may comprise adjusting a differential timing between gas discharges in the seed laser and amplifier laser for bandwidth control, based on the error signal, or for control of another laser operating parameter other than bandwidth, without utilizing any beam magnification control, or adjusting a differential timing between gas discharges in the seed laser and amplifier laser for bandwidth control, based on the error signal, or for control of another laser operating parameter other than bandwidth, while utilizing beam magnification control for other than bandwidth control, and adjusting a differential timing between gas discharges in the seed laser and amplifier laser for bandwidth control, based on the error signal, or for control of another laser operating parameter other than bandwidth, while utilizing beam magnification control for bandwidth control based on the error signal.

    摘要翻译: 根据所公开的主题的实施例的方面,公开了可以包括基于误差信号调整种子激光器中的气体放电与放大器激光器之间的差分定时以进行带宽控制的方法和装置,或者用于控制另一激光器 除了带宽以外的操作参数,不利用任何光束放大控制,或者基于误差信号调整种子激光器和放大器激光器中的气体放电之间的差分定时,或用于控制除带宽以外的另一激光器操作参数, 同时利用除带宽控制之外的光束放大控制,并且基于误差信号调整种子激光器和放大器激光器中的气体放电之间的差分定时,或者用于控制除带宽之外的另一激光器操作参数,同时利用 基于误差信号的带宽控制的光束放大控制。

    Laser gas injection system
    3.
    发明授权
    Laser gas injection system 有权
    激光喷射系统

    公开(公告)号:US07835414B2

    公开(公告)日:2010-11-16

    申请号:US11796065

    申请日:2007-04-25

    IPC分类号: H01S3/22

    摘要: A method and apparatus are disclosed which may comprise predicting the gas lifetime for a gas discharge laser light source for a photolithography process, the light source comprising a halogen containing lasing gas may comprise: utilizing at least one of a plurality of laser operating input and/or output parameters; utilizing a set of at least one parameter of utilization in the photolithography process to determine a gas use model in relation to the respective input or output parameter; predicting the end of gas life based upon the model and a measurement of the respective input or output parameter. The parameter may comprise a pulse utilization pattern. The method and apparatus may comprise performing gas management for a gas discharge laser light source for a photolithography process, the light source comprising a halogen containing lasing gas comprising: utilizing periodic and frequent partial gas refills comprising an inject comprising a mixture of halogen gas and bulk gas in generally the same ration as the premix ratio provided to the laser in a full gas refill, and in an amount less than two percent of the total gas pressure prior to the injection.

    摘要翻译: 公开了一种方法和装置,其可以包括预测用于光刻工艺的气体放电激光光源的气体寿命,包括含卤素的激光气体的光源可以包括:利用多个激光操作输入和/ 或输出参数; 在光刻工艺中利用一组至少一个利用参数来确定相对于相应输入或输出参数的气体使用模型; 基于模型和相应的输入或输出参数的测量来预测气体寿命的结束。 该参数可以包括脉冲利用模式。 该方法和装置可以包括对用于光刻工艺的气体放电激光光源执行气体管理,该光源包括含卤素的激光气体,其包括:利用周期性和频繁的部分气体再填充,其包括含有卤素气体和体积的混合物 气体通常与在全气体再填充中提供给激光器的预混合比率相同,并且其量小于喷射前的总气体压力的2%。

    Method and apparatus for stabilizing and tuning the bandwidth of laser light
    4.
    发明申请
    Method and apparatus for stabilizing and tuning the bandwidth of laser light 有权
    稳定和调谐激光带宽的方法和装置

    公开(公告)号:US20080232408A1

    公开(公告)日:2008-09-25

    申请号:US12082253

    申请日:2008-04-09

    IPC分类号: H01S3/102 H01S3/098

    摘要: According to aspects of an embodiment of the disclosed subject matter, method and apparatus are disclose that ma y comprise adjusting a differential timing between gas discharges in the seed laser and amplifier laser for bandwidth control, based on the error signal, or for control of another laser operating parameter other than bandwidth, without utilizing any beam magnification control, or adjusting a differential timing between gas discharges in the seed laser and amplifier laser for bandwidth control, based on the error signal, or for control of another laser operating parameter other than bandwidth, while utilizing beam magnification control for other than bandwidth control, and adjusting a differential timing between gas discharges in the seed laser and amplifier laser for bandwidth control, based on the error signal, or for control of another laser operating parameter other than bandwidth, while utilizing beam magnification control for bandwidth control based on the error signal.

    摘要翻译: 根据所公开的主题的实施例的方面,公开了一种方法和装置,其包括基于误差信号调整种子激光器中的气体放电与用于带宽控制的放大器激光器之间的差分定时,或用于控制另一个 除了带宽之外的激光操作参数,不利用任何光束放大控制,或者基于误差信号调整用于带宽控制的种子激光器和放大器激光器中的气体放电之间的差分定时,或用于除带宽以外的另一激光器操作参数的控制 同时利用除带宽控制之外的光束放大控制,并且基于误差信号调整种子激光器和放大器激光器中的气体放电之间的差分定时,或用于控制除带宽之外的另一个激光器操作参数,同时 利用基于误差信号的带宽控制的光束放大控制。

    Methods for PCR and HLA Typing Using Unpurified Samples
    6.
    发明申请
    Methods for PCR and HLA Typing Using Unpurified Samples 审中-公开
    使用未净化样品进行PCR和HLA分型的方法

    公开(公告)号:US20160348171A1

    公开(公告)日:2016-12-01

    申请号:US15237369

    申请日:2016-08-15

    IPC分类号: C12Q1/68

    摘要: Provided are methods for amplifying a gene or RNA or sets thereof of interest using a tandem PCR process. The primers in the first PCR or set of PCR reactions are locus-specific. The primers in the second PCR or set of PCR reactions are specific for a sub-sequence of the locus-specific primers and completely consumed during the second PCR amplification. For RNA amplification, the first PCR is reverse transcription and the resulting cDNA(s) provide a template for cRNA synthesis, endpoint PCR or real time PCR. Also provided is a tandem PCR method which accepts raw, completely unpurified mouthwash, cheek swabs and ORAGENE-stabilized saliva as the sample input, the resulting amplicons serving as the substrate for complex, microarray-based genetic testing. Also provided is a method of allelotyping a gene or set thereof by amplifying the gene(s) using tandem PCR on DNA or RNA comprising the sample.

    摘要翻译: 提供了使用串联PCR方法扩增感兴趣的基因或RNA或其组的方法。 第一个PCR或一组PCR反应中的引物是基因座特异性的。 第二次PCR或一组PCR反应中的引物对基因座特异性引物的亚序列是特异的,并且在第二次PCR扩增期间完全消耗。 对于RNA扩增,第一个PCR是逆转录,所得到的cDNA提供了用于cRNA合成,终点PCR或实时PCR的模板。 还提供了串联PCR方法,其接受原始的,完全未纯化的漱口水,颊拭子和ORAGENE稳定的唾液作为样品输入,所得扩增子用作复杂的基于微阵列的遗传测试的底物。 还提供了通过使用串联PCR在包含样品的DNA或RNA上扩增基因来等位基因的方法。

    METHOD AND APPARATUS FOR CONTROLLING LIGHT BANDWIDTH
    7.
    发明申请
    METHOD AND APPARATUS FOR CONTROLLING LIGHT BANDWIDTH 有权
    控制光束带宽的方法和装置

    公开(公告)号:US20110249691A1

    公开(公告)日:2011-10-13

    申请号:US12755772

    申请日:2010-04-07

    IPC分类号: H01S3/10

    摘要: An apparatus includes a light source that produces a light beam, a bandwidth measurement system, a plurality of bandwidth actuation systems, and a control system. Each bandwidth actuation system includes one or more bandwidth actuators and each bandwidth actuation system is connected to an optical feature that is optically coupled to the produced light beam and operable to modify the connected optical feature to select a bandwidth within a bandwidth range of the produced light beam. The control system is connected to the bandwidth measurement system and to the plurality of bandwidth actuation systems. The control system is configured to switch between activating and operating a first bandwidth actuation system and activating and operating a second bandwidth actuation system independently and separately of activating and operating the first bandwidth actuation system based on a provided bandwidth measurement and a selected target bandwidth.

    摘要翻译: 一种装置包括产生光束的光源,带宽测量系统,多个带宽致动系统和控制系统。 每个带宽致动系统包括一个或多个带宽致动器,并且每个带宽致动系统连接到光学特征,该光学特征光学地耦合到所产生的光束并且可操作以修改所连接的光学特征,以在所产生的光的带宽范围内选择带宽 光束。 控制系统连接到带宽测量系统和多个带宽致动系统。 控制系统被配置为在激活和操作第一带宽致动系统之间切换,并且基于所提供的带宽测量和所选择的目标带宽,独立且独立地激活和操作第一带宽致动系统来激活和操作第二带宽致动系统。

    Control segment-based lever-arm correction via curve fitting for high accuracy navigation
    8.
    发明授权
    Control segment-based lever-arm correction via curve fitting for high accuracy navigation 有权
    通过曲线拟合控制段的杠杆臂校正,实现高精度导航

    公开(公告)号:US07221316B2

    公开(公告)日:2007-05-22

    申请号:US11247640

    申请日:2005-10-10

    IPC分类号: H04B7/185

    CPC分类号: B64G1/1014 B64G1/24

    摘要: A method and apparatus for estimating a lever arm correction between the wide beam antenna and the spot beam antenna in a navigational satellite system is disclosed. A prescribed satellite maneuver is used to increase the accuracy of the predicted satellite attitude in determining the lever arm, and lever arm corrections are provided from a ground segment to navigation receivers using curve fit coefficients to permit long range estimates and to minimize data transmission requirements.

    摘要翻译: 公开了一种用于估计所述宽波束天线和一个导航卫星系统中的点波束天线之间的杠杆臂的校正方法和设备。 将规定卫星机动用于提高在确定控制杆臂所预测的卫星姿态的精确度,并且从地面部分被提供给使用曲线拟合系数以允许长范围估计,并尽量减少数据传输的要求导航接收机杠杆臂校正。

    Return link design for PSD limited mobile satellite communication systems

    公开(公告)号:US07054593B2

    公开(公告)日:2006-05-30

    申请号:US09884555

    申请日:2001-06-19

    IPC分类号: H04B7/185

    摘要: A system and method for managing access to a satellite-based transponder by a plurality of aircraft each having a mobile radio frequency (RF) system. The system employs a ground-based, central control system for managing access to the satellite-based transponder so that the aggregate power spectral density (PSD) of the RF signals of all the mobile systems does not exceed, at any time, limits established by regulatory agencies to prevent interference between satellite systems. This is accomplished by a dual control loop arrangement for monitoring the signal-to-noise ratio (Eb/No) of the RF signal transmitted by the satellite-based transponder. A ground-based control loop is used whereby a ground-based central controller monitors the Eb/No and transmits commands to the aircraft (via the satellite transponder) to maintain the Eb/No of the transmitted signal within a predetermined range. A fast scan angle compensation is used by the mobile system of the aircraft to implement another control loop to further adjust the transmit power. This control loop maintains the Eb/No of the signal transmitted to the satellite-based transponder at the commanded level inbetween updates from the ground-based central controller.

    User bandwidth monitor and control management system and method
    10.
    发明授权
    User bandwidth monitor and control management system and method 有权
    用户带宽监控与管理系统及方法

    公开(公告)号:US06754230B2

    公开(公告)日:2004-06-22

    申请号:US09943839

    申请日:2001-08-31

    IPC分类号: H04J316

    摘要: A communication method for equitably distributing access to a shared broadband signal having a defined bandwidth to ensure that each user accessing the system receives at least a predetermined minimum bandwidth connection. The method uses a server system that includes at least one server and a plurality of client systems connected to at least one server. A respective user utilizes each client system. The method includes controlling user access to the shared broadband signal, monitoring an amount of the signal bandwidth used by each user, and controlling an amount of the signal bandwidth available to each user based on a total usage of the bandwidth.

    摘要翻译: 一种用于公平地分配对具有定义的带宽的共享宽带信号的访问的通信方法,以确保访问系统的每个用户接收至少预定的最小带宽连接。 该方法使用包括至少一个服务器和连接到至少一个服务器的多个客户端系统的服务器系统。 相应的用户利用每个客户端系统。 该方法包括控制用户对共享宽带信号的访问,监视每个用户使用的信号带宽的量,以及基于带宽的总使用量来控制每个用户可用的信号带宽的量。